TY - JOUR
T1 - RZLINE code modelling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation
AU - Koshelev, K.
AU - Noivkov, V.G.
AU - Medvedev, Viacheslav
AU - Grushin, A.S.
AU - Krivtsun, V.M.
PY - 2012
Y1 - 2012
N2 - Abstract. An integrated model is developed to describe the hydrodynamics, atomic, and radiation processes that take place in extreme ultraviolet (EUV) radiation sources based on a laser-produced plasma with a distributed tin target. The modeling was performed using the RZLINE code—a numerical code for the simulation of EUV emission by hot dense plasmas. The purpose of the simulation is to evaluate the spectral characteristics of the radiation source, conversion efficiency, source size, evaporation rate of the target, energetic, and space distribution of debris (nanoparticles, neutrals, and ions). The advantages of a distributed target in comparison with a single droplet target are also discussed.
AB - Abstract. An integrated model is developed to describe the hydrodynamics, atomic, and radiation processes that take place in extreme ultraviolet (EUV) radiation sources based on a laser-produced plasma with a distributed tin target. The modeling was performed using the RZLINE code—a numerical code for the simulation of EUV emission by hot dense plasmas. The purpose of the simulation is to evaluate the spectral characteristics of the radiation source, conversion efficiency, source size, evaporation rate of the target, energetic, and space distribution of debris (nanoparticles, neutrals, and ions). The advantages of a distributed target in comparison with a single droplet target are also discussed.
KW - IR-100029
KW - METIS-298229
U2 - 10.1117/1.JMM.11.2.021112
DO - 10.1117/1.JMM.11.2.021112
M3 - Article
SN - 1932-5150
VL - 11
SP - 021112-1-021112-6
JO - Journal of micro/nanolithography, MEMS, and MOEMS
JF - Journal of micro/nanolithography, MEMS, and MOEMS
IS - 2
M1 - 021112
ER -