RZLINE code modelling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

K. Koshelev, V.G. Noivkov, Viacheslav Medvedev, A.S. Grushin, V.M. Krivtsun

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Abstract. An integrated model is developed to describe the hydrodynamics, atomic, and radiation processes that take place in extreme ultraviolet (EUV) radiation sources based on a laser-produced plasma with a distributed tin target. The modeling was performed using the RZLINE code—a numerical code for the simulation of EUV emission by hot dense plasmas. The purpose of the simulation is to evaluate the spectral characteristics of the radiation source, conversion efficiency, source size, evaporation rate of the target, energetic, and space distribution of debris (nanoparticles, neutrals, and ions). The advantages of a distributed target in comparison with a single droplet target are also discussed.
Original languageEnglish
Article number021112
Pages (from-to)021112-1-021112-6
JournalJournal of micro/nanolithography, MEMS, and MOEMS
Issue number2
Publication statusPublished - 2012


  • IR-100029
  • METIS-298229

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