Sacrificial wafer bonding

V.L. Spiering, Johan W. Berenschot, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 30 Jun 1994
    EventMESA Dag 1994 - Best Western Dish Hotel, Enschede, Netherlands
    Duration: 30 Jun 199430 Jun 1994

    Conference

    ConferenceMESA Dag 1994
    CountryNetherlands
    CityEnschede
    Period30/06/9430/06/94
    Other(MESA Day/Meeting)

    Keywords

    • METIS-114659

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