Sacrificial wafer bonding: a useful tool in micromachining

V.L. Spiering, Johan W. Berenschot, Michael Curt Elwenspoek, J.H.J. Fluitman

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 17 Feb 1994
Event	Dutch Conference on Sensor Technology 1994 - University of Twente, Enschede, Netherlands Duration: 17 Feb 1994 → 18 Feb 1994

Conference	Dutch Conference on Sensor Technology 1994
Country/Territory	Netherlands
City	Enschede
Period	17/02/94 → 18/02/94

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

@conference{3b1fd7a2e59d4651a4ece7415319e7a2,

title = "Sacrificial wafer bonding: a useful tool in micromachining",

author = "V.L. Spiering and Berenschot, {Johan W.} and Elwenspoek, {Michael Curt} and J.H.J. Fluitman",

year = "1994",

month = feb,

day = "17",

language = "English",

note = "Dutch Conference on Sensor Technology 1994 ; Conference date: 17-02-1994 Through 18-02-1994",

}