Sacrificial wafer bonding: a useful tool in micromachining

V.L. Spiering, H. Berends, M.C. Elwenspoek, J.H.J. Fluitman

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationSensor technology 1994
    Subtitle of host publicationproceedings of the Dutch conference on sensor technology 1994, University of Twente, Enschede, the Netherlands, February 17-18, 1994
    EditorsP.V. Lambeck
    Place of PublicationUtrecht
    ISBN (Print)90-73461-06-5
    Publication statusPublished - 17 Feb 1994

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