Sacrificial wafer bonding for planarization after very deep etching

V.L. Spiering, Johan W. Berenschot, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Contribution to journal › Article › Academic › peer-review

    7 Citations (Scopus)
    160 Downloads (Pure)

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    Biochemistry, Genetics and Molecular Biology