SAMs meet MEMS - A new monolayer assisted surface microfabrication and release technique

B.J. Kim, M. Liebau, Jurriaan Huskens, David Reinhoudt, J.P. Brugger

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Micro- and Nano-Engineering 2000
Place of Publication	Jena, Germany
Pages	-
Publication status	Published - 18 Sept 2000
Event	26th International Conference on Micro-and Nano- Engineering, MNE 2000 - Jena, Germany Duration: 18 Sept 2000 → 21 Sept 2000 Conference number: 26

Conference	26th International Conference on Micro-and Nano- Engineering, MNE 2000
Abbreviated title	MNE
Country/Territory	Germany
City	Jena
Period	18/09/00 → 21/09/00

Keywords

@inproceedings{794974a9a35e4e4ca212e9a7101ae836,

title = "SAMs meet MEMS - A new monolayer assisted surface microfabrication and release technique",

keywords = "IR-13195, METIS-107376",

author = "B.J. Kim and M. Liebau and Jurriaan Huskens and David Reinhoudt and J.P. Brugger",

year = "2000",

month = sep,

day = "18",

language = "Undefined",

pages = "--",

booktitle = "Micro- and Nano-Engineering 2000",

note = "26th International Conference on Micro-and Nano- Engineering, MNE 2000 ; Conference date: 18-09-2000 Through 21-09-2000",

}

TY - GEN

T1 - SAMs meet MEMS - A new monolayer assisted surface microfabrication and release technique

AU - Kim, B.J.

AU - Liebau, M.

AU - Huskens, Jurriaan

AU - Reinhoudt, David

AU - Brugger, J.P.

N1 - Conference code: 26

PY - 2000/9/18

Y1 - 2000/9/18

KW - IR-13195

KW - METIS-107376

M3 - Conference contribution

SP - -

BT - Micro- and Nano-Engineering 2000

CY - Jena, Germany

T2 - 26th International Conference on Micro-and Nano- Engineering, MNE 2000

Y2 - 18 September 2000 through 21 September 2000

ER -