SAMs meet MEMS - A new monolayer assisted surface microfabrication and release technique

B.J. Kim, M. Liebau, Jurriaan Huskens, David Reinhoudt, J.P. Brugger

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationMicro- and Nano-Engineering 2000
Place of PublicationJena, Germany
Pages-
Publication statusPublished - 18 Sep 2000
Event26th International Conference on Micro-and Nano- Engineering, MNE 2000 - Jena, Germany
Duration: 18 Sep 200021 Sep 2000
Conference number: 26

Conference

Conference26th International Conference on Micro-and Nano- Engineering, MNE 2000
Abbreviated titleMNE
CountryGermany
CityJena
Period18/09/0021/09/00

Keywords

  • IR-13195
  • METIS-107376

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