Scalable six-axis force-torque sensor with a large range for biomechanical applications

Robert Anton Brookhuis; Remco J. Wiegerink; Theodorus S.J. Lammerink; Meint J. de Boer

doi:10.1109/MEMSYS.2012.6170258

Scalable six-axis force-torque sensor with a large range for biomechanical applications

Robert Anton Brookhuis, Remco J. Wiegerink, Theodorus S.J. Lammerink, Meint J. de Boer

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

11 Citations (Scopus)

1 Downloads (Pure)

Abstract

A scalable silicon six-axis force-torque sensor is designed and realized to be used for measurement of the power transfer between the human body and the environment. Capacitive readout is used to detect all axial force components and all torque components simultaneously. Small electrode gaps in combination with mechanical amplification by the sensor structure result in a high sensitivity. The miniature sensor has a wide force range of up to 50 N in normal direction, 10 N in shear direction and 25 N-mm of maximum torque around each axis, and can easily be scaled to adapt for other force/torque ranges.

Original language	Undefined
Title of host publication	Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
Place of Publication	USA
Publisher	IEEE Computer Society
Pages	595-598
Number of pages	4
ISBN (Print)	978-1-4673-0324-8
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170258
Publication status	Published - 29 Jan 2012
Event	25th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: 29 Jan 2012 → 2 Feb 2012 Conference number: 25

Publication series

Name
Publisher	IEEE Computer Society
ISSN (Print)	1084-6999

Conference

Conference	25th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2012
Abbreviated title	MEMS
Country/Territory	France
City	Paris
Period	29/01/12 → 2/02/12

Keywords

EWI-22736
METIS-296179
TST-SENSORS
IR-84148

Access to Document

10.1109/MEMSYS.2012.6170258

http://eprints.eemcs.utwente.nl/secure2/22736/01/final_published_version_-_Brookhuis_-_2012_-_Scalable_six-axis_force-torque_sensor_with_a_large_range_for_biomechanical_applications_.pdf

Cite this

@inproceedings{b53fde656cd848ab9813e9d2b6c7e493,

title = "Scalable six-axis force-torque sensor with a large range for biomechanical applications",

abstract = "A scalable silicon six-axis force-torque sensor is designed and realized to be used for measurement of the power transfer between the human body and the environment. Capacitive readout is used to detect all axial force components and all torque components simultaneously. Small electrode gaps in combination with mechanical amplification by the sensor structure result in a high sensitivity. The miniature sensor has a wide force range of up to 50 N in normal direction, 10 N in shear direction and 25 N-mm of maximum torque around each axis, and can easily be scaled to adapt for other force/torque ranges.",

keywords = "EWI-22736, METIS-296179, TST-SENSORS, IR-84148",

author = "Brookhuis, {Robert Anton} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and {de Boer}, {Meint J.}",

note = "10.1109/MEMSYS.2012.6170258 ; null ; Conference date: 29-01-2012 Through 02-02-2012",

year = "2012",

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day = "29",

doi = "10.1109/MEMSYS.2012.6170258",

language = "Undefined",

isbn = "978-1-4673-0324-8",

publisher = "IEEE Computer Society",

pages = "595--598",

booktitle = "Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on",

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}

Brookhuis, RA, Wiegerink, RJ , Lammerink, TSJ & de Boer, MJ 2012, Scalable six-axis force-torque sensor with a large range for biomechanical applications. in Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on. IEEE Computer Society, USA, pp. 595-598, 25th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 29/01/12. https://doi.org/10.1109/MEMSYS.2012.6170258

Scalable six-axis force-torque sensor with a large range for biomechanical applications. / Brookhuis, Robert Anton; Wiegerink, Remco J.; Lammerink, Theodorus S.J. et al.

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on. USA : IEEE Computer Society, 2012. p. 595-598.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AB - A scalable silicon six-axis force-torque sensor is designed and realized to be used for measurement of the power transfer between the human body and the environment. Capacitive readout is used to detect all axial force components and all torque components simultaneously. Small electrode gaps in combination with mechanical amplification by the sensor structure result in a high sensitivity. The miniature sensor has a wide force range of up to 50 N in normal direction, 10 N in shear direction and 25 N-mm of maximum torque around each axis, and can easily be scaled to adapt for other force/torque ranges.

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