Scalable six-axis force-torque sensor with a large range for biomechanical applications

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    Abstract

    A scalable silicon six-axis force-torque sensor is designed and realized to be used for measurement of the power transfer between the human body and the environment. Capacitive readout is used to detect all axial force components and all torque components simultaneously. Small electrode gaps in combination with mechanical amplification by the sensor structure result in a high sensitivity. The miniature sensor has a wide force range of up to 50 N in normal direction, 10 N in shear direction and 25 N-mm of maximum torque around each axis, and can easily be scaled to adapt for other force/torque ranges.
    Original languageUndefined
    Title of host publicationMicro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on
    Place of PublicationUSA
    PublisherIEEE Computer Society
    Pages595-598
    Number of pages4
    ISBN (Print)978-1-4673-0324-8
    DOIs
    Publication statusPublished - 29 Jan 2012
    Event25th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
    Duration: 29 Jan 20122 Feb 2012
    Conference number: 25

    Publication series

    Name
    PublisherIEEE Computer Society
    ISSN (Print)1084-6999

    Conference

    Conference25th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2012
    Abbreviated titleMEMS
    CountryFrance
    CityParis
    Period29/01/122/02/12

    Keywords

    • EWI-22736
    • METIS-296179
    • TST-SENSORS
    • IR-84148

    Cite this

    Brookhuis, R. A., Wiegerink, R. J., Lammerink, T. S. J., & de Boer, M. J. (2012). Scalable six-axis force-torque sensor with a large range for biomechanical applications. In Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on (pp. 595-598). USA: IEEE Computer Society. https://doi.org/10.1109/MEMSYS.2012.6170258