Abstract
Manipulators with guidance constructions based on elastic mechanisms are of interest for the increasing number of precision vacuum applications. Previously, the design of an elastic MEMS-based 6-DOFs manipulator was presented. Characterization in six degrees of freedom (DOFs) of a manipulator the size of several square millimeters, however, is difficult. Therefore, a scaled-up version of the manipulator was built. This ‘macro’ version serves as a research platform for the verification of the flexible multibody model including control that was set up using the SPACAR toolbox for Matlab.
| Original language | Undefined |
|---|---|
| Pages (from-to) | 42-47 |
| Number of pages | 6 |
| Journal | Mikroniek |
| Volume | 49 |
| Issue number | 5 |
| Publication status | Published - 2009 |
Keywords
- IR-89563
- METIS-259506
Cite this
Huijts, M., Brouwer, D. M., & van Dijk, J. (2009). Scale-up for model verification; design, modeling and control of an elastic parallel kinematic 6-DOFs manipulator. Mikroniek, 49(5), 42-47.