Scale-up for model verification; design, modeling and control of an elastic parallel kinematic 6-DOFs manipulator

Martijn Huijts, Dannis Michel Brouwer, Johannes van Dijk

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Abstract

Manipulators with guidance constructions based on elastic mechanisms are of interest for the increasing number of precision vacuum applications. Previously, the design of an elastic MEMS-based 6-DOFs manipulator was presented. Characterization in six degrees of freedom (DOFs) of a manipulator the size of several square millimeters, however, is difficult. Therefore, a scaled-up version of the manipulator was built. This ‘macro’ version serves as a research platform for the verification of the flexible multibody model including control that was set up using the SPACAR toolbox for Matlab.
Original languageUndefined
Pages (from-to)42-47
Number of pages6
JournalMikroniek
Volume49
Issue number5
Publication statusPublished - 2009

Keywords

  • IR-89563
  • METIS-259506

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