Scale-up for model verification; design, modeling and control of an elastic parallel kinematic 6-DOFs manipulator

Martijn Huijts, Dannis Michel Brouwer, Johannes van Dijk

Research output: Contribution to journalArticleProfessional

45 Downloads (Pure)


Manipulators with guidance constructions based on elastic mechanisms are of interest for the increasing number of precision vacuum applications. Previously, the design of an elastic MEMS-based 6-DOFs manipulator was presented. Characterization in six degrees of freedom (DOFs) of a manipulator the size of several square millimeters, however, is difficult. Therefore, a scaled-up version of the manipulator was built. This ‘macro’ version serves as a research platform for the verification of the flexible multibody model including control that was set up using the SPACAR toolbox for Matlab.
Original languageUndefined
Pages (from-to)42-47
Number of pages6
Issue number5
Publication statusPublished - 2009


  • IR-89563
  • METIS-259506

Cite this