Scaling behaviour of pressure-driven micro-hydraulic systems

Niels Roelof Tas, Theodorus S.J. Lammerink, Johan W. Berenschot, Michael Curt Elwenspoek, Albert van den Berg

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    2 Citations (Scopus)
    105 Downloads (Pure)

    Abstract

    This paper presents a lumped network approach for the modelling and design of micro-hydraulic systems. A hydraulic oscillator has been built consisting of hydraulic resistors, capacitors and transistors (pressure controlled valves). The scaling of micro-hydraulic networks consisting of linear resistors, capacitors and inertances has been studied. An important result is that to make smaller networks faster, driving pressures should increase with reducing size.
    Original languageUndefined
    Title of host publicationTechnical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
    Place of PublicationCambridge, USA
    PublisherComputational Publications
    Pages174-177
    Number of pages4
    ISBN (Print)0970827571
    Publication statusPublished - 21 Apr 2002
    EventTechnical 2002 International Conference on Modeling and Simulation of Microsystems - San Juan, Puerto Rico
    Duration: 21 Apr 200225 Apr 2002

    Conference

    ConferenceTechnical 2002 International Conference on Modeling and Simulation of Microsystems
    Period21/04/0225/04/02
    Other21 - 25 april 2002

    Keywords

    • METIS-206817
    • IR-43531
    • EWI-12692

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