ScAlN thin films for PiezoMEMS devices: an alternative for perovskite piezoelectric materials

D.M. Nguyen, Tobias Nickel, Mohammad Sangchap, MD Mahmudul Hasan, G. Koster, A.J.H.M. Rijnders*

*Corresponding author for this work

Research output: Contribution to conferencePosterAcademic

Original languageEnglish
Publication statusPublished - 23 Sept 2024
EventMESA+ Day 2024 - Kinepolis, Enschede, Netherlands
Duration: 23 Sept 202423 Sept 2024

Conference

ConferenceMESA+ Day 2024
Country/TerritoryNetherlands
CityEnschede
Period23/09/2423/09/24

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