Scanning Force Microscopy using Optical interferometry

A.J. den Boef

Research output: ThesisPhD Thesis - Research UT, graduation external

Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Bölger, B., Supervisor
Award date21 Feb 1991
Place of PublicationEnschede, Universiteit Twente
Print ISBNs90-9003887-6
Publication statusPublished - 21 Feb 1991

Keywords

  • METIS-128216

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