Sealed joint between components for example of piezo-electrically controlled micro-pump - has silicium connector between glass and gold-plated surfaces, which are heated to produce seal

A. Saaman (Inventor), A.J. Sprenkels (Inventor), H.T.G. van Lintel (Inventor)

Research output: Patent

Original languageUndefined
Patent number1e Nederland / EP809
Priority date3/12/97
Publication statusSubmitted - 3 Dec 1995


  • METIS-118292

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