Sealed joint between components for example of piezo-electrically controlled micro-pump - has silicium connector between glass and gold-plated surfaces, which are heated to produce seal

A. Saaman; A.J. Sprenkels; H.T.G. van Lintel

Sealed joint between components for example of piezo-electrically controlled micro-pump - has silicium connector between glass and gold-plated surfaces, which are heated to produce seal

A. Saaman (Inventor)
, A.J. Sprenkels (Inventor)
, H.T.G. van Lintel (Inventor)

University of Twente

Research output: Patent

Original language	Undefined
Patent number	1e Nederland / EP809
Priority date	3/12/97
Publication status	Submitted - 3 Dec 1995

Keywords

METIS-118292

Cite this

@misc{627cd0d64a514c77887c022b1623d9b7,

title = "Sealed joint between components for example of piezo-electrically controlled micro-pump - has silicium connector between glass and gold-plated surfaces, which are heated to produce seal",

keywords = "METIS-118292",

author = "A. Saaman and A.J. Sprenkels and \{van Lintel\}, H.T.G.",

note = "Aanvraag octrooi door UT-er ; 1e Nederland / EP809",

year = "1995",

month = dec,

day = "3",

language = "Undefined",

type = "Patent",

}

TY - PAT

T1 - Sealed joint between components for example of piezo-electrically controlled micro-pump - has silicium connector between glass and gold-plated surfaces, which are heated to produce seal

AU - Saaman, A.

AU - Sprenkels, A.J.

AU - van Lintel, H.T.G.

N1 - Aanvraag octrooi door UT-er

PY - 1995/12/3

Y1 - 1995/12/3

KW - METIS-118292

M3 - Patent

M1 - 1e Nederland / EP809

ER -