Selective fusion bonding by surface roughness control

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of the 1999 Joint international meeting
Place of PublicationHawaii
Pages1017-
Publication statusPublished - 17 Oct 1999

Keywords

  • IR-15817
  • METIS-112699

Cite this

Gui, C., Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., van den Berg, A., & Elwenspoek, M. C. (1999). Selective fusion bonding by surface roughness control. In Proceedings of the 1999 Joint international meeting (pp. 1017-). Hawaii.
@inproceedings{81d7622c24704696a0ed7c4f8607cf01,
title = "Selective fusion bonding by surface roughness control",
keywords = "IR-15817, METIS-112699",
author = "C. Gui and R.E. Oosterbroek and Berenschot, {Johan W.} and Stefan Schlautmann and Lammerink, {Theodorus S.J.} and {van den Berg}, Albert and Elwenspoek, {Michael Curt}",
year = "1999",
month = "10",
day = "17",
language = "Undefined",
isbn = "1-56677-265-6",
pages = "1017--",
booktitle = "Proceedings of the 1999 Joint international meeting",

}

Gui, C, Oosterbroek, RE, Berenschot, JW, Schlautmann, S, Lammerink, TSJ, van den Berg, A & Elwenspoek, MC 1999, Selective fusion bonding by surface roughness control. in Proceedings of the 1999 Joint international meeting. Hawaii, pp. 1017-.

Selective fusion bonding by surface roughness control. / Gui, C.; Oosterbroek, R.E.; Berenschot, Johan W.; Schlautmann, Stefan; Lammerink, Theodorus S.J.; van den Berg, Albert; Elwenspoek, Michael Curt.

Proceedings of the 1999 Joint international meeting. Hawaii, 1999. p. 1017-.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Selective fusion bonding by surface roughness control

AU - Gui, C.

AU - Oosterbroek, R.E.

AU - Berenschot, Johan W.

AU - Schlautmann, Stefan

AU - Lammerink, Theodorus S.J.

AU - van den Berg, Albert

AU - Elwenspoek, Michael Curt

PY - 1999/10/17

Y1 - 1999/10/17

KW - IR-15817

KW - METIS-112699

M3 - Conference contribution

SN - 1-56677-265-6

SP - 1017-

BT - Proceedings of the 1999 Joint international meeting

CY - Hawaii

ER -

Gui C, Oosterbroek RE, Berenschot JW, Schlautmann S, Lammerink TSJ, van den Berg A et al. Selective fusion bonding by surface roughness control. In Proceedings of the 1999 Joint international meeting. Hawaii. 1999. p. 1017-