Selective fusion bonding by surface roughness control

C. Gui, R.E. Oosterbroek, Johan W. Berenschot, Stefan Schlautmann, Theodorus S.J. Lammerink, Albert van den Berg, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the 1999 Joint international meeting
    Place of PublicationHawaii
    Pages1017-
    Publication statusPublished - 17 Oct 1999

    Keywords

    • IR-15817
    • METIS-112699

    Cite this

    Gui, C., Oosterbroek, R. E., Berenschot, J. W., Schlautmann, S., Lammerink, T. S. J., van den Berg, A., & Elwenspoek, M. C. (1999). Selective fusion bonding by surface roughness control. In Proceedings of the 1999 Joint international meeting (pp. 1017-). Hawaii.