Selective fusion bonding by surface roughness control

C. Gui; R.E. Oosterbroek; Johan W. Berenschot; Stefan Schlautmann; Theodorus S.J. Lammerink; Albert van den Berg; Michael Curt Elwenspoek

Selective fusion bonding by surface roughness control

C. Gui, R.E. Oosterbroek, Johan W. Berenschot, Stefan Schlautmann, Theodorus S.J. Lammerink, Albert van den Berg, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the 1999 Joint international meeting
Place of Publication	Hawaii
Pages	1017-
Publication status	Published - 17 Oct 1999
Event	1999 Joint international meeting, the 196th Meeting of The Electrochemical Society and 1999 Fall Meeting of The Electrochemical Society of Japan - Honolulu, Hawai Duration: 17 Oct 1999 → 22 Oct 1999

Conference

Conference	1999 Joint international meeting, the 196th Meeting of The Electrochemical Society and 1999 Fall Meeting of The Electrochemical Society of Japan
Period	17/10/99 → 22/10/99
Other	October 17-22, 1999

Keywords

IR-15817
METIS-112699

Cite this

@inproceedings{81d7622c24704696a0ed7c4f8607cf01,

title = "Selective fusion bonding by surface roughness control",

keywords = "IR-15817, METIS-112699",

author = "C. Gui and R.E. Oosterbroek and Berenschot, {Johan W.} and Stefan Schlautmann and Lammerink, {Theodorus S.J.} and {van den Berg}, Albert and Elwenspoek, {Michael Curt}",

year = "1999",

month = oct,

day = "17",

language = "Undefined",

isbn = "1-56677-265-6",

pages = "1017--",

booktitle = "Proceedings of the 1999 Joint international meeting",

note = "1999 Joint international meeting, the 196th Meeting of The Electrochemical Society and 1999 Fall Meeting of The Electrochemical Society of Japan ; Conference date: 17-10-1999 Through 22-10-1999",

}

Gui, C, Oosterbroek, RE, Berenschot, JW , Schlautmann, S , Lammerink, TSJ , van den Berg, A & Elwenspoek, MC 1999, Selective fusion bonding by surface roughness control. in Proceedings of the 1999 Joint international meeting. Hawaii, pp. 1017-, 1999 Joint international meeting, the 196th Meeting of The Electrochemical Society and 1999 Fall Meeting of The Electrochemical Society of Japan, 17/10/99.

TY - GEN

T1 - Selective fusion bonding by surface roughness control

AU - Gui, C.

AU - Oosterbroek, R.E.

AU - Berenschot, Johan W.

AU - Schlautmann, Stefan

AU - Lammerink, Theodorus S.J.

AU - van den Berg, Albert

AU - Elwenspoek, Michael Curt

PY - 1999/10/17

Y1 - 1999/10/17

KW - IR-15817

KW - METIS-112699

M3 - Conference contribution

SN - 1-56677-265-6

SP - 1017-

BT - Proceedings of the 1999 Joint international meeting

CY - Hawaii

T2 - 1999 Joint international meeting, the 196th Meeting of The Electrochemical Society and 1999 Fall Meeting of The Electrochemical Society of Japan

Y2 - 17 October 1999 through 22 October 1999

ER -