Selective fusion bonding by surface roughness control

C. Gui; R.E. Oosterbroek; Johan W. Berenschot; Stefan Schlautmann; Theodorus S.J. Lammerink; Albert van den Berg; Michael Curt Elwenspoek

Selective fusion bonding by surface roughness control

C. Gui, R.E. Oosterbroek, Johan W. Berenschot, Stefan Schlautmann, Theodorus S.J. Lammerink, Albert van den Berg, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the 1999 Joint international meeting
Place of Publication	Hawaii
Pages	1017-
Publication status	Published - 17 Oct 1999

Keywords

IR-15817
METIS-112699

Cite this

@inproceedings{81d7622c24704696a0ed7c4f8607cf01,

title = "Selective fusion bonding by surface roughness control",

keywords = "IR-15817, METIS-112699",

author = "C. Gui and R.E. Oosterbroek and Berenschot, {Johan W.} and Stefan Schlautmann and Lammerink, {Theodorus S.J.} and {van den Berg}, Albert and Elwenspoek, {Michael Curt}",

year = "1999",

month = oct,

day = "17",

language = "Undefined",

isbn = "1-56677-265-6",

pages = "1017--",

booktitle = "Proceedings of the 1999 Joint international meeting",

}

Selective fusion bonding by surface roughness control. / Gui, C.; Oosterbroek, R.E.; Berenschot, Johan W.; Schlautmann, Stefan ; Lammerink, Theodorus S.J.; van den Berg, Albert; Elwenspoek, Michael Curt.

Proceedings of the 1999 Joint international meeting. Hawaii, 1999. p. 1017-.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Selective fusion bonding by surface roughness control

AU - Gui, C.

AU - Oosterbroek, R.E.

AU - Berenschot, Johan W.

AU - Schlautmann, Stefan

AU - Lammerink, Theodorus S.J.

AU - van den Berg, Albert

AU - Elwenspoek, Michael Curt

PY - 1999/10/17

Y1 - 1999/10/17

KW - IR-15817

KW - METIS-112699

M3 - Conference contribution

SN - 1-56677-265-6

SP - 1017-

BT - Proceedings of the 1999 Joint international meeting

CY - Hawaii

ER -