Selective mode exitation and detection of micromachined resonators

A. Prak, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationPapendal
    Publication statusPublished - 16 Mar 1993

    Keywords

    • METIS-117993

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