Selective mode exitation and detection of micromachined resonators

A. Prak, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationPapendal
    Publication statusPublished - 16 Mar 1993

    Keywords

    • METIS-117993

    Cite this

    Prak, A., Elwenspoek, M. C., & Fluitman, J. H. J. (1993, Mar 16). Selective mode exitation and detection of micromachined resonators. Papendal.
    Prak, A. ; Elwenspoek, Michael Curt ; Fluitman, J.H.J. / Selective mode exitation and detection of micromachined resonators. 1993. Papendal.
    @misc{99bf64be6c1047ea9e38a0ff8607a949,
    title = "Selective mode exitation and detection of micromachined resonators",
    keywords = "METIS-117993",
    author = "A. Prak and Elwenspoek, {Michael Curt} and J.H.J. Fluitman",
    year = "1993",
    month = "3",
    day = "16",
    language = "Undefined",
    type = "Other",

    }

    Prak, A, Elwenspoek, MC & Fluitman, JHJ 1993, Selective mode exitation and detection of micromachined resonators. Papendal.

    Selective mode exitation and detection of micromachined resonators. / Prak, A.; Elwenspoek, Michael Curt; Fluitman, J.H.J.

    Papendal. 1993, .

    Research output: Other contributionOther research output

    TY - GEN

    T1 - Selective mode exitation and detection of micromachined resonators

    AU - Prak, A.

    AU - Elwenspoek, Michael Curt

    AU - Fluitman, J.H.J.

    PY - 1993/3/16

    Y1 - 1993/3/16

    KW - METIS-117993

    M3 - Other contribution

    CY - Papendal

    ER -

    Prak A, Elwenspoek MC, Fluitman JHJ. Selective mode exitation and detection of micromachined resonators. 1993.