Selective mode exitation and detection of micromachined resonators

A. Prak, Michael Curt Elwenspoek, J.H.J. Fluitman

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationPapendal
    Publication statusPublished - 16 Mar 1993

    Keywords

    • METIS-117993

    Cite this

    Prak, A., Elwenspoek, M. C., & Fluitman, J. H. J. (1993, Mar 16). Selective mode exitation and detection of micromachined resonators. Papendal.