| Original language | Undefined |
|---|---|
| Place of Publication | Papendal |
| Publication status | Published - 16 Mar 1993 |
Keywords
- METIS-117993
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Selective mode exitation and detection of micromachined resonators
- A. Prak
- , Michael Curt Elwenspoek
- , J.H.J. Fluitman
Research output: Other contribution › Other research output