Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical system devices

J.P. Brugger, C. Andreoli, M. Despont, U. Drechsler, H. Rothuizen, P. Vettiger

    Research output: Contribution to journalArticleAcademicpeer-review

    35 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)329-334
    JournalSensors and actuators. A: Physical
    Issue number76
    Publication statusPublished - 1999


    • METIS-111670

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