Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical system devices

J.P. Brugger, C. Andreoli, M. Despont, U. Drechsler, H. Rothuizen, P. Vettiger

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined
Pages (from-to)	329-334
Journal	Sensors and Actuators A: Physical
Volume	1999
Issue number	76
Publication status	Published - 1999

Keywords

@article{063dfbf88cef44079ec06116fef46715,

title = "Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical system devices",

keywords = "METIS-111670",

author = "J.P. Brugger and C. Andreoli and M. Despont and U. Drechsler and H. Rothuizen and P. Vettiger",

year = "1999",

language = "Undefined",

volume = "1999",

pages = "329--334",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier B.V.",

number = "76",

}

TY - JOUR

T1 - Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical system devices

AU - Brugger, J.P.

AU - Andreoli, C.

AU - Despont, M.

AU - Drechsler, U.

AU - Rothuizen, H.

AU - Vettiger, P.

PY - 1999

Y1 - 1999

KW - METIS-111670

M3 - Article

SN - 0924-4247

VL - 1999

SP - 329

EP - 334

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 76

ER -