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Self-Aligned Crystallographic Multiplication of Nanoscale Silicon Wedges for High-Density Fabrication of 3D Nanodevices
Erwin Berenschot*, Roald M. Tiggelaar, Bjorn Borgelink, Chris Van Kampen, Cristian S. Deenen, Yasser Pordeli, Haye Witteveen, Han J.G.E. Gardeniers, Niels R. Tas
*Corresponding author for this work
Research output: Contribution to journal › Article › Academic › peer-review
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