Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles

Bjorn T.H. Borgelink; Erwin J.W. Berenschot; Remco G.P. Sanders; Stefan Schlautmann; Han Gardeniers; Niels R. Tas

doi:10.1109/MEMS51670.2022.9699536

Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles

Bjorn T.H. Borgelink, Erwin J.W. Berenschot, Remco G.P. Sanders, Stefan Schlautmann, Han Gardeniers, Niels R. Tas

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

Silicon dioxide pedestal nozzles are introduced, featuring a sharp concentric rim with an edge angle of approximately 5° and a sub-20 nm radius of curvature. The nozzles show an unprecedented ability to pin the contact line of de-ionized water, and apparent contact angles exceeding 210° were observed. A dynamic contact angle characterization method is introduced to determine the pinning capabilities of the nozzle. The nozzle is vibrated with a piezo actuator and brings pendant droplets close to their resonance frequency. Larger contact angles are observed for smaller droplets, because they can be driven closer to the resonance frequency before pinch-off.

Original language	English
Title of host publication	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Publisher	IEEE
Pages	259-262
Number of pages	4
ISBN (Electronic)	9781665409117
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699536
Publication status	Published - 11 Feb 2022
Event	35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 9 Jan 2022 → 13 Jan 2022 Conference number: 35 https://ieeemems2022.org/

Publication series

Name	IEEE Symposium on Mass Storage Systems and Technologies
Volume	2022-January
ISSN (Print)	2160-1968

Conference

Conference	35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Abbreviated title	MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	9/01/22 → 13/01/22
Internet address	https://ieeemems2022.org/

Keywords

contact line pinning
droplet
microfluidics
Micronozzle
silicon machining
22/4 OA procedure

Access to Document

10.1109/MEMS51670.2022.9699536

Borgelink-2022-Self-aligned-fabrication-and-contacFinal published version, 991 KBLicence: Taverne

Cite this

Borgelink, B. T. H., Berenschot, E. J. W., Sanders, R. G. P., Schlautmann, S., Gardeniers, H., & Tas, N. R. (2022). Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 259-262). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE. https://doi.org/10.1109/MEMS51670.2022.9699536

@inproceedings{fceebdc1e9f941ec8a231d361007588d,

title = "Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles",

abstract = "Silicon dioxide pedestal nozzles are introduced, featuring a sharp concentric rim with an edge angle of approximately 5° and a sub-20 nm radius of curvature. The nozzles show an unprecedented ability to pin the contact line of de-ionized water, and apparent contact angles exceeding 210° were observed. A dynamic contact angle characterization method is introduced to determine the pinning capabilities of the nozzle. The nozzle is vibrated with a piezo actuator and brings pendant droplets close to their resonance frequency. Larger contact angles are observed for smaller droplets, because they can be driven closer to the resonance frequency before pinch-off.",

keywords = "contact line pinning, droplet, microfluidics, Micronozzle, silicon machining, 22/4 OA procedure",

author = "Borgelink, {Bjorn T.H.} and Berenschot, {Erwin J.W.} and Sanders, {Remco G.P.} and Stefan Schlautmann and Han Gardeniers and Tas, {Niels R.}",

note = "Funding Information: B.T.H.B. highly appreciated the help of Jelle Schoppink with setting up the high-speed camera. B.T.H.B., E.J.W.B., H.G. and N.R.T received funding from the European Research Council (ERC) under the European Union{\textquoteright}s Horizon 2020 research and innovation program (grant agreement no. 742004). Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

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doi = "10.1109/MEMS51670.2022.9699536",

language = "English",

series = "IEEE Symposium on Mass Storage Systems and Technologies",

publisher = "IEEE",

pages = "259--262",

booktitle = "35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022",

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Borgelink, BTH, Berenschot, EJW , Sanders, RGP , Schlautmann, S , Gardeniers, H & Tas, NR 2022, Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Symposium on Mass Storage Systems and Technologies, vol. 2022-January, IEEE, pp. 259-262, 35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 9/01/22. https://doi.org/10.1109/MEMS51670.2022.9699536

Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles. / Borgelink, Bjorn T.H.; Berenschot, Erwin J.W.; Sanders, Remco G.P. et al.
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE, 2022. p. 259-262 (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Borgelink, Bjorn T.H.

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AU - Schlautmann, Stefan

AU - Gardeniers, Han

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N2 - Silicon dioxide pedestal nozzles are introduced, featuring a sharp concentric rim with an edge angle of approximately 5° and a sub-20 nm radius of curvature. The nozzles show an unprecedented ability to pin the contact line of de-ionized water, and apparent contact angles exceeding 210° were observed. A dynamic contact angle characterization method is introduced to determine the pinning capabilities of the nozzle. The nozzle is vibrated with a piezo actuator and brings pendant droplets close to their resonance frequency. Larger contact angles are observed for smaller droplets, because they can be driven closer to the resonance frequency before pinch-off.

AB - Silicon dioxide pedestal nozzles are introduced, featuring a sharp concentric rim with an edge angle of approximately 5° and a sub-20 nm radius of curvature. The nozzles show an unprecedented ability to pin the contact line of de-ionized water, and apparent contact angles exceeding 210° were observed. A dynamic contact angle characterization method is introduced to determine the pinning capabilities of the nozzle. The nozzle is vibrated with a piezo actuator and brings pendant droplets close to their resonance frequency. Larger contact angles are observed for smaller droplets, because they can be driven closer to the resonance frequency before pinch-off.

KW - contact line pinning

KW - droplet

KW - microfluidics

KW - Micronozzle

KW - silicon machining

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Borgelink BTH, Berenschot EJW , Sanders RGP , Schlautmann S , Gardeniers H , Tas NR. Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE. 2022. p. 259-262. (IEEE Symposium on Mass Storage Systems and Technologies). doi: 10.1109/MEMS51670.2022.9699536

Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles

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Keywords

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