@inproceedings{fceebdc1e9f941ec8a231d361007588d,
title = "Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles",
abstract = "Silicon dioxide pedestal nozzles are introduced, featuring a sharp concentric rim with an edge angle of approximately 5° and a sub-20 nm radius of curvature. The nozzles show an unprecedented ability to pin the contact line of de-ionized water, and apparent contact angles exceeding 210° were observed. A dynamic contact angle characterization method is introduced to determine the pinning capabilities of the nozzle. The nozzle is vibrated with a piezo actuator and brings pendant droplets close to their resonance frequency. Larger contact angles are observed for smaller droplets, because they can be driven closer to the resonance frequency before pinch-off.",
keywords = "contact line pinning, droplet, microfluidics, Micronozzle, silicon machining, 22/4 OA procedure",
author = "Borgelink, {Bjorn T.H.} and Berenschot, {Erwin J.W.} and Sanders, {Remco G.P.} and Stefan Schlautmann and Han Gardeniers and Tas, {Niels R.}",
note = "Funding Information: B.T.H.B. highly appreciated the help of Jelle Schoppink with setting up the high-speed camera. B.T.H.B., E.J.W.B., H.G. and N.R.T received funding from the European Research Council (ERC) under the European Union{\textquoteright}s Horizon 2020 research and innovation program (grant agreement no. 742004). Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",
year = "2022",
month = feb,
day = "11",
doi = "10.1109/MEMS51670.2022.9699536",
language = "English",
series = "IEEE Symposium on Mass Storage Systems and Technologies",
publisher = "IEEE Computer Society",
pages = "259--262",
booktitle = "35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022",
address = "United States",
}