Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

51 Downloads (Pure)

Abstract

Silicon dioxide pedestal nozzles are introduced, featuring a sharp concentric rim with an edge angle of approximately 5° and a sub-20 nm radius of curvature. The nozzles show an unprecedented ability to pin the contact line of de-ionized water, and apparent contact angles exceeding 210° were observed. A dynamic contact angle characterization method is introduced to determine the pinning capabilities of the nozzle. The nozzle is vibrated with a piezo actuator and brings pendant droplets close to their resonance frequency. Larger contact angles are observed for smaller droplets, because they can be driven closer to the resonance frequency before pinch-off.

Original languageEnglish
Title of host publication35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
PublisherIEEE
Pages259-262
Number of pages4
ISBN (Electronic)9781665409117
DOIs
Publication statusPublished - 11 Feb 2022
Event35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
Duration: 9 Jan 202213 Jan 2022
Conference number: 35
https://ieeemems2022.org/

Publication series

NameIEEE Symposium on Mass Storage Systems and Technologies
Volume2022-January
ISSN (Print)2160-1968

Conference

Conference35th International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Abbreviated titleMEMS 2022
Country/TerritoryJapan
CityTokyo
Period9/01/2213/01/22
Internet address

Keywords

  • contact line pinning
  • droplet
  • microfluidics
  • Micronozzle
  • silicon machining
  • 22/4 OA procedure

Fingerprint

Dive into the research topics of 'Self-Aligned Fabrication and Contact Line Pinning Characterization of Pedestal Nozzles'. Together they form a unique fingerprint.

Cite this