Self-aligned fabrication of nanomechanical and nanoelectronic devices by convex corner lithography on silicon wedges

Céline Steenge; Lucas Kooijman; Chris van Kampen; Bjorn Borgelink; Yves Janssens; Yasser Pordeli; Roald Tiggelaar; Erwin Berenschot; Niels Tas

Self-aligned fabrication of nanomechanical and nanoelectronic devices by convex corner lithography on silicon wedges

Céline Steenge, Lucas Kooijman, Chris van Kampen, Bjorn Borgelink, Yves Janssens, Yasser Pordeli, Roald Tiggelaar, Erwin Berenschot, Niels Tas

Research output: Contribution to conference › Paper

Original language	English
Pages	38-41
Publication status	Published - 2023
Event	8th International Workshop on Nanotechnology and Application, IWNA 2023 - Phan Thiet, Viet Nam Duration: 8 Nov 2023 → 11 Nov 2023 Conference number: 8

Workshop

Workshop	8th International Workshop on Nanotechnology and Application, IWNA 2023
Abbreviated title	IWNA
Country/Territory	Viet Nam
City	Phan Thiet
Period	8/11/23 → 11/11/23

Keywords

NLA

Cite this

Steenge, C., Kooijman, L., van Kampen, C., Borgelink, B., Janssens, Y., Pordeli, Y., Tiggelaar, R., Berenschot, E., & Tas, N. (2023). Self-aligned fabrication of nanomechanical and nanoelectronic devices by convex corner lithography on silicon wedges. 38-41. Paper presented at 8th International Workshop on Nanotechnology and Application, IWNA 2023, Phan Thiet, Viet Nam.

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title = "Self-aligned fabrication of nanomechanical and nanoelectronic devices by convex corner lithography on silicon wedges",

keywords = "NLA",

author = "C{\'e}line Steenge and Lucas Kooijman and {van Kampen}, Chris and Bjorn Borgelink and Yves Janssens and Yasser Pordeli and Roald Tiggelaar and Erwin Berenschot and Niels Tas",

year = "2023",

language = "English",

pages = "38--41",

note = "8th International Workshop on Nanotechnology and Application, IWNA 2023, IWNA ; Conference date: 08-11-2023 Through 11-11-2023",

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Steenge, C, Kooijman, L, van Kampen, C, Borgelink, B, Janssens, Y, Pordeli, Y, Tiggelaar, R , Berenschot, E & Tas, N 2023, 'Self-aligned fabrication of nanomechanical and nanoelectronic devices by convex corner lithography on silicon wedges', Paper presented at 8th International Workshop on Nanotechnology and Application, IWNA 2023, Phan Thiet, Viet Nam, 8/11/23 - 11/11/23 pp. 38-41.

TY - CONF

T1 - Self-aligned fabrication of nanomechanical and nanoelectronic devices by convex corner lithography on silicon wedges

AU - Steenge, Céline

AU - Kooijman, Lucas

AU - van Kampen, Chris

AU - Borgelink, Bjorn

AU - Janssens, Yves

AU - Pordeli, Yasser

AU - Tiggelaar, Roald

AU - Berenschot, Erwin

AU - Tas, Niels

N1 - Conference code: 8

PY - 2023

Y1 - 2023

KW - NLA

M3 - Paper

SP - 38

EP - 41

T2 - 8th International Workshop on Nanotechnology and Application, IWNA 2023

Y2 - 8 November 2023 through 11 November 2023

ER -