Self-aligned fabrication of nanomechanical and nanoelectronic devices by convex corner lithography on silicon wedges

Céline Steenge; Lucas Kooijman; Chris van Kampen; Bjorn Borgelink; Yves Janssens; Yasser Pordeli; Roald Tiggelaar; Erwin Berenschot; Niels Tas

Self-aligned fabrication of nanomechanical and nanoelectronic devices by convex corner lithography on silicon wedges

Céline Steenge
, Lucas Kooijman
, Chris van Kampen
, Bjorn Borgelink
, Yves Janssens
, Yasser Pordeli
, Roald Tiggelaar
, Erwin Berenschot
, Niels Tas

Research output: Contribution to conference › Paper

Original language	English
Pages	38-41
Publication status	Published - 2023
Event	8th International Workshop on Nanotechnology and Application, IWNA 2023 - Phan Thiet, Viet Nam Duration: 8 Nov 2023 → 11 Nov 2023 Conference number: 8

Workshop

Workshop	8th International Workshop on Nanotechnology and Application, IWNA 2023
Abbreviated title	IWNA
Country/Territory	Viet Nam
City	Phan Thiet
Period	8/11/23 → 11/11/23

Keywords

NLA

Cite this

Steenge, C., Kooijman, L., van Kampen, C., Borgelink, B., Janssens, Y., Pordeli, Y., Tiggelaar, R., Berenschot, E., & Tas, N. (2023). Self-aligned fabrication of nanomechanical and nanoelectronic devices by convex corner lithography on silicon wedges. 38-41. Paper presented at 8th International Workshop on Nanotechnology and Application, IWNA 2023, Phan Thiet, Viet Nam.

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title = "Self-aligned fabrication of nanomechanical and nanoelectronic devices by convex corner lithography on silicon wedges",

keywords = "NLA",

author = "C{\'e}line Steenge and Lucas Kooijman and \{van Kampen\}, Chris and Bjorn Borgelink and Yves Janssens and Yasser Pordeli and Roald Tiggelaar and Erwin Berenschot and Niels Tas",

year = "2023",

language = "English",

pages = "38--41",

note = "8th International Workshop on Nanotechnology and Application, IWNA 2023, IWNA ; Conference date: 08-11-2023 Through 11-11-2023",

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Steenge, C, Kooijman, L, van Kampen, C, Borgelink, B, Janssens, Y, Pordeli, Y, Tiggelaar, R , Berenschot, E & Tas, N 2023, 'Self-aligned fabrication of nanomechanical and nanoelectronic devices by convex corner lithography on silicon wedges', Paper presented at 8th International Workshop on Nanotechnology and Application, IWNA 2023, Phan Thiet, Viet Nam, 8/11/23 - 11/11/23 pp. 38-41.

TY - CONF

T1 - Self-aligned fabrication of nanomechanical and nanoelectronic devices by convex corner lithography on silicon wedges

AU - Steenge, Céline

AU - Kooijman, Lucas

AU - van Kampen, Chris

AU - Borgelink, Bjorn

AU - Janssens, Yves

AU - Pordeli, Yasser

AU - Tiggelaar, Roald

AU - Berenschot, Erwin

AU - Tas, Niels

N1 - Conference code: 8

PY - 2023

Y1 - 2023

KW - NLA

M3 - Paper

SP - 38

EP - 41

T2 - 8th International Workshop on Nanotechnology and Application, IWNA 2023

Y2 - 8 November 2023 through 11 November 2023

ER -