Self assembled three-dimensional nonvolatile memories

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    Abstract

    A promising strategy for for the realisation of three- dimensional memories could be the self assembly of ar- ticial sub-micron elements (smarticles). Such elements can be realised by combining edge-lithography techniques and anisotropic etching. The first experiments into this direction are encouraging.
    Original languageUndefined
    Place of PublicationEnschede
    PublisherCentre for Telematics and Information Technology (CTIT)
    Number of pages13
    Publication statusPublished - 1 Jul 2009

    Publication series

    NameCTIT Technical Report Series
    PublisherUniversity of Twente, Centre for Telematics and Information Technology (CTIT)
    No.TR-CTIT-09-29
    ISSN (Print)1381-3625

    Keywords

    • IR-67517
    • METIS-263915
    • TST-uSPAM: micro Scanning Probe Array Memory
    • EWI-15686
    • 3D memories smarticles self-assembly MEMS

    Cite this

    Abelmann, L., Tas, N. R., Berenschot, J. W., & Elwenspoek, M. C. (2009). Self assembled three-dimensional nonvolatile memories. (CTIT Technical Report Series; No. TR-CTIT-09-29). Enschede: Centre for Telematics and Information Technology (CTIT).