Self assembled three-dimensional nonvolatile memories

Research output: Book/ReportReportProfessional

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Abstract

A promising strategy for for the realisation of three- dimensional memories could be the self assembly of ar- ticial sub-micron elements (smarticles). Such elements can be realised by combining edge-lithography techniques and anisotropic etching. The first experiments into this direction are encouraging.
Original languageUndefined
Place of PublicationEnschede
PublisherCentre for Telematics and Information Technology (CTIT)
Number of pages13
Publication statusPublished - 1 Jul 2009

Publication series

NameCTIT Technical Report Series
PublisherUniversity of Twente, Centre for Telematics and Information Technology (CTIT)
No.TR-CTIT-09-29
ISSN (Print)1381-3625

Keywords

  • IR-67517
  • METIS-263915
  • TST-uSPAM: micro Scanning Probe Array Memory
  • EWI-15686
  • 3D memories smarticles self-assembly MEMS

Cite this

Abelmann, L., Tas, N. R., Berenschot, J. W., & Elwenspoek, M. C. (2009). Self assembled three-dimensional nonvolatile memories. (CTIT Technical Report Series; No. TR-CTIT-09-29). Enschede: Centre for Telematics and Information Technology (CTIT).
Abelmann, Leon ; Tas, Niels Roelof ; Berenschot, Johan W. ; Elwenspoek, Michael Curt. / Self assembled three-dimensional nonvolatile memories. Enschede : Centre for Telematics and Information Technology (CTIT), 2009. 13 p. (CTIT Technical Report Series; TR-CTIT-09-29).
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keywords = "IR-67517, METIS-263915, TST-uSPAM: micro Scanning Probe Array Memory, EWI-15686, 3D memories smarticles self-assembly MEMS",
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Abelmann, L, Tas, NR, Berenschot, JW & Elwenspoek, MC 2009, Self assembled three-dimensional nonvolatile memories. CTIT Technical Report Series, no. TR-CTIT-09-29, Centre for Telematics and Information Technology (CTIT), Enschede.

Self assembled three-dimensional nonvolatile memories. / Abelmann, Leon; Tas, Niels Roelof; Berenschot, Johan W.; Elwenspoek, Michael Curt.

Enschede : Centre for Telematics and Information Technology (CTIT), 2009. 13 p. (CTIT Technical Report Series; No. TR-CTIT-09-29).

Research output: Book/ReportReportProfessional

TY - BOOK

T1 - Self assembled three-dimensional nonvolatile memories

AU - Abelmann, Leon

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AU - Elwenspoek, Michael Curt

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PY - 2009/7/1

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AB - A promising strategy for for the realisation of three- dimensional memories could be the self assembly of ar- ticial sub-micron elements (smarticles). Such elements can be realised by combining edge-lithography techniques and anisotropic etching. The first experiments into this direction are encouraging.

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KW - METIS-263915

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - EWI-15686

KW - 3D memories smarticles self-assembly MEMS

M3 - Report

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BT - Self assembled three-dimensional nonvolatile memories

PB - Centre for Telematics and Information Technology (CTIT)

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ER -

Abelmann L, Tas NR, Berenschot JW, Elwenspoek MC. Self assembled three-dimensional nonvolatile memories. Enschede: Centre for Telematics and Information Technology (CTIT), 2009. 13 p. (CTIT Technical Report Series; TR-CTIT-09-29).