@book{3a870e10ad8840d991a68c5231891724,
title = "Self assembled three-dimensional nonvolatile memories",
abstract = "A promising strategy for for the realisation of three- dimensional memories could be the self assembly of ar- ticial sub-micron elements (smarticles). Such elements can be realised by combining edge-lithography techniques and anisotropic etching. The first experiments into this direction are encouraging.",
keywords = "IR-67517, METIS-263915, TST-uSPAM: micro Scanning Probe Array Memory, EWI-15686, 3D memories smarticles self-assembly MEMS",
author = "Leon Abelmann and Tas, {Niels Roelof} and Berenschot, {Johan W.} and Elwenspoek, {Michael Curt}",
note = "Coupled to paper EPrints 17411",
year = "2009",
month = jul,
day = "1",
language = "Undefined",
series = "CTIT Technical Report Series",
publisher = "Centre for Telematics and Information Technology (CTIT)",
number = "TR-CTIT-09-29",
address = "Netherlands",
}