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Self-limiting growth and thickness- and temperature-dependence of optical constants of ALD AlN thin films
- H. Van Bui
- , M.d. Nguyen
- , F.B. Wiggers
- , A.A.I. Aarnink
- , M.P. de Jong
- , A.Y. Kovalgin
Research output: Contribution to journal › Article › Academic › peer-review
42
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(Scopus)
6
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