Self-tuning feedforward control for active vibration isolation of precision machines

M.A. Beijen, J. van Dijk, W.B.J. Hakvoort, M.F. Heertjes

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    14 Citations (Scopus)
    343 Downloads (Pure)


    A novel feedforward control strategy is presented to isolate precision machinery from broadband floor vibrations. The control strategy aims at limiting the low-frequency controller gain, to prevent drift and actuator saturation, while still obtaining optimal vibration isolation performance at higher frequencies. This is achieved by limiting the low-frequency control action such that almost no phase shift is introduced at higher frequencies. To minimize model uncertainties, the feedforward controller is implemented as a self-tuning IIR filter that estimates the parameters online. Only a few parameters have to be estimated, which makes the algorithm computationally efficient. An additional feedback controller is designed to make the self-tuning algorithm more robust. The effects of feedforward and feedback control add up. The control strategy is successfully validated on an experimental setup of a vibration isolator.

    Original languageEnglish
    Pages (from-to)5611-5616
    Number of pages6
    JournalIFAC proceedings volumes
    Issue number3
    Publication statusPublished - 2014
    Event19th IFAC World Congress 2014 - Cape Town International Convention Centre, Cape Town, South Africa
    Duration: 24 Aug 201429 Aug 2014
    Conference number: 19


    • Active vibration isolation
    • Feedforward control
    • Self-tuning
    • Semi-conductor industry


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