This paper proposes a multi-input multi-output (MIMO) disturbance feedforward controller to improve the rejection of floor vibrations in active vibration isolation systems for high-precision machinery. To minimize loss of performance due to model uncertainties, the feedforward controller is implemented as a self-tuning generalized FIR filter. This filter contains a priori knowledge of the poles, such that relatively few parameters have to be estimated which makes the algorithm computationally efficient. The zeros of the filter are estimated using the filtered-error least mean squares (FeLMS) algorithm. Residual noise shaping is used to reduce bias. Conditions on convergence speed, stability, bias, and the effects of sensor noise on the self-tuning algorithm are discussed in detail. The combined control strategy is validated on a 6-DOF Stewart platform, which serves as a multi-axis and hard-mounted vibration isolation system, and shows significant improvement in the rejection of floor vibrations.
- Active vibration isolation
- High-precision mechatronics
- Least mean squares optimization
- MIMO feedforward control