SEM and AES depth profile studies of thin titanium and titanium oxide films covered by nanoscale evaporated Au layers

A.H.J. van den Berg, W.F. Lisowski, M.A. Smithers

Research output: Other contribution › Other research output

Original language	Undefined
Place of Publication	10. Arbeitstagung AOFA10, Kaiserslautern, Duitslan
Publication status	Published - 7 Sept 1998

Keywords

@misc{d0783ec720474df7b115a731abeec795,

title = "SEM and AES depth profile studies of thin titanium and titanium oxide films covered by nanoscale evaporated Au layers",

keywords = "METIS-131207",

author = "{van den Berg}, A.H.J. and W.F. Lisowski and M.A. Smithers",

year = "1998",

month = sep,

day = "7",

language = "Undefined",

type = "Other",

}