SEM and AES depth profile studies of thin titanium and titanium oxide films covered by nanoscale evaporated Au layers

A.H.J. van den Berg, W.F. Lisowski, M.A. Smithers

Research output: Other contribution › Other research output

Keywords

@misc{4cb2aaf69e0f436a9eacb5690361f2fe,

title = "SEM and AES depth profile studies of thin titanium and titanium oxide films covered by nanoscale evaporated Au layers",

keywords = "METIS-131174",

author = "{van den Berg}, A.H.J. and W.F. Lisowski and M.A. Smithers",

year = "1998",

month = oct,

day = "16",

language = "Undefined",

type = "Other",

}