Semiconductor-based electret sensors for sound and pressure

J.A. Voorthuyzen, Piet Bergveld, A.J. Sprenkels

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    Abstract

    The theory and experimental results for integrated electret-based silicon sensors for the detection of sound and pressure are presented. A silicon electret microphone for use in hearing-aids is described. It has an experimentally determined sensitivity of 19 mV/Pa in the frequency range of 50 Hz to 10 kHz. The realization of a pressure sensor for application in catheter-tip blood-pressure measurements is discussed. This type of electret sensor appeared to have a pressure sensitivity of 1.6 ¿V/Pa in the required frequency range of 0 to 100 Hz
    Original languageEnglish
    Pages (from-to)267-276
    JournalIEEE transactions on electrical insulation
    Volume24
    Issue number2
    DOIs
    Publication statusPublished - 1989

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