Semiconductor-based electret sensors for sound and pressure

J.A. Voorthuyzen; Piet Bergveld; A.J. Sprenkels

doi:10.1109/14.90285

Semiconductor-based electret sensors for sound and pressure

J.A. Voorthuyzen, Piet Bergveld, A.J. Sprenkels

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Abstract

The theory and experimental results for integrated electret-based silicon sensors for the detection of sound and pressure are presented. A silicon electret microphone for use in hearing-aids is described. It has an experimentally determined sensitivity of 19 mV/Pa in the frequency range of 50 Hz to 10 kHz. The realization of a pressure sensor for application in catheter-tip blood-pressure measurements is discussed. This type of electret sensor appeared to have a pressure sensitivity of 1.6 ¿V/Pa in the required frequency range of 0 to 100 Hz

Original language	English
Pages (from-to)	267-276
Journal	IEEE transactions on electrical insulation
Volume	24
Issue number	2
DOIs	https://doi.org/10.1109/14.90285
Publication status	Published - 1989

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Cite this

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abstract = "The theory and experimental results for integrated electret-based silicon sensors for the detection of sound and pressure are presented. A silicon electret microphone for use in hearing-aids is described. It has an experimentally determined sensitivity of 19 mV/Pa in the frequency range of 50 Hz to 10 kHz. The realization of a pressure sensor for application in catheter-tip blood-pressure measurements is discussed. This type of electret sensor appeared to have a pressure sensitivity of 1.6 ¿V/Pa in the required frequency range of 0 to 100 Hz",

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AB - The theory and experimental results for integrated electret-based silicon sensors for the detection of sound and pressure are presented. A silicon electret microphone for use in hearing-aids is described. It has an experimentally determined sensitivity of 19 mV/Pa in the frequency range of 50 Hz to 10 kHz. The realization of a pressure sensor for application in catheter-tip blood-pressure measurements is discussed. This type of electret sensor appeared to have a pressure sensitivity of 1.6 ¿V/Pa in the required frequency range of 0 to 100 Hz

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