Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array

J.J.J. van Baar, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationProceedings of Transducers 2001
    Pages1436-1439
    Publication statusPublished - 10 Jun 2001
    Event15th European Conference on Solid-State Transducers, Eurosensors XV - Munich, Germany
    Duration: 10 Jun 200114 Jun 2001

    Conference

    Conference15th European Conference on Solid-State Transducers, Eurosensors XV
    CountryGermany
    CityMunich
    Period10/06/0114/06/01

    Keywords

    • METIS-201176
    • IR-42364

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