Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array

J.J.J. van Baar; Remco J. Wiegerink; Gijsbertus J.M. Krijnen; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array

J.J.J. van Baar
, Remco J. Wiegerink
, Gijsbertus J.M. Krijnen
, Theodorus S.J. Lammerink
, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of Transducers 2001
Pages	1436-1439
Publication status	Published - 10 Jun 2001
Event	15th European Conference on Solid-State Transducers, Eurosensors XV - Munich, Germany Duration: 10 Jun 2001 → 14 Jun 2001

Conference

Conference	15th European Conference on Solid-State Transducers, Eurosensors XV
Country/Territory	Germany
City	Munich
Period	10/06/01 → 14/06/01

Keywords

METIS-201176
IR-42364

Cite this

@inproceedings{05c8c48f211946b08c0e6011652b27a9,

title = "Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array",

keywords = "METIS-201176, IR-42364",

author = "\{van Baar\}, J.J.J. and Wiegerink, \{Remco J.\} and Krijnen, \{Gijsbertus J.M.\} and Lammerink, \{Theodorus S.J.\} and Elwenspoek, \{Michael Curt\}",

year = "2001",

month = jun,

day = "10",

language = "English",

isbn = "3-540-42150-5",

pages = "1436--1439",

booktitle = "Proceedings of Transducers 2001",

note = "15th European Conference on Solid-State Transducers, Eurosensors XV ; Conference date: 10-06-2001 Through 14-06-2001",

}

TY - GEN

T1 - Sensitive thermal flow sensor based on a micro-machined two dimensional resistor array

AU - van Baar, J.J.J.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

PY - 2001/6/10

Y1 - 2001/6/10

KW - METIS-201176

KW - IR-42364

M3 - Conference contribution

SN - 3-540-42150-5

SP - 1436

EP - 1439

BT - Proceedings of Transducers 2001

T2 - 15th European Conference on Solid-State Transducers, Eurosensors XV

Y2 - 10 June 2001 through 14 June 2001

ER -