Sensors and actuators, Twente

Piet Bergveld

doi:10.1016/0250-6874(89)80061-7

Sensors and actuators, Twente

Piet Bergveld

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Abstract

This paper describes the organization and the research programme of the Sensor and Actuator (S&A) Research Unit of the University of Twente, Enschede, the Netherlands. It includes short descriptions of all present projects concerning: micromachined mechanical sensors and actuators, optical sensors, recording media and sensors based on magnetic materials, FET-based sensors and systems and the integration of electronic functions and systems in sensor chips.

Original language	English
Pages (from-to)	3-26
Journal	Sensors and actuators
Volume	17
Issue number	1-2
DOIs	https://doi.org/10.1016/0250-6874(89)80061-7
Publication status	Published - 1989

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title = "Sensors and actuators, Twente",

abstract = "This paper describes the organization and the research programme of the Sensor and Actuator (S&A) Research Unit of the University of Twente, Enschede, the Netherlands. It includes short descriptions of all present projects concerning: micromachined mechanical sensors and actuators, optical sensors, recording media and sensors based on magnetic materials, FET-based sensors and systems and the integration of electronic functions and systems in sensor chips.",

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AB - This paper describes the organization and the research programme of the Sensor and Actuator (S&A) Research Unit of the University of Twente, Enschede, the Netherlands. It includes short descriptions of all present projects concerning: micromachined mechanical sensors and actuators, optical sensors, recording media and sensors based on magnetic materials, FET-based sensors and systems and the integration of electronic functions and systems in sensor chips.

U2 - 10.1016/0250-6874(89)80061-7

DO - 10.1016/0250-6874(89)80061-7

M3 - Article

SN - 0250-6874

VL - 17

SP - 3

EP - 26

JO - Sensors and actuators

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ER -

Sensors and actuators, Twente

Abstract

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