Separation of intrinsic dielectric and resistive electrode losses in ferroelectric capacitors at radio frequencies

M.P.J. Tiggelman, K. Reimann, M. Klee, Jurriaan Schmitz, Raymond Josephus Engelbart Hueting, J. Liu, Y. Furukawa, R. Mauczok, W. Keur

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    Abstract

    To analyze the intrinsic dielectric performance of planar high-density capacitors at radio frequencies (RF), the dielectric losses need to be distinguished from the resistive electrode losses. The resistive losses of the electrodes at RF are de-embedded employing a linear regression procedure with partial compensation for distributed effects. We use tunable ferroelectric capacitors with a barium strontium titanate (BST) dielectric with an inner diameter d ≥ 8 μm on a silicon substrate. The de-embedding of the electrode losses has been successfully performed utilizing 1-Port RF measurement data from of an Advantest R3767CG vector network analyzer (VNA) in the frequency range of 10 MHz – 8 GHz.
    Original languageUndefined
    Title of host publication10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)
    Place of PublicationUtrecht, The Netherlands
    PublisherSTW
    Pages465-467
    Number of pages3
    ISBN (Print)978-90-73461-49-9
    Publication statusPublished - 29 Nov 2007
    Event10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007 - Veldhoven, Netherlands
    Duration: 29 Nov 200730 Nov 2007

    Publication series

    Name
    PublisherTechnology Foundation STW
    Number7

    Workshop

    Workshop10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007
    Country/TerritoryNetherlands
    CityVeldhoven
    Period29/11/0730/11/07

    Keywords

    • SC-ICF: Integrated Circuit Fabrication
    • METIS-245936
    • IR-62113
    • EWI-11721

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