To analyze the intrinsic dielectric performance of planar high-density capacitors at radio frequencies (RF), the dielectric losses need to be distinguished from the resistive electrode losses. The resistive losses of the electrodes at RF are de-embedded employing a linear regression procedure with partial compensation for distributed effects. We use tunable ferroelectric capacitors with a barium strontium titanate (BST) dielectric with an inner diameter d ≥ 8 μm on a silicon substrate. The de-embedding of the electrode losses has been successfully performed utilizing 1-Port RF measurement data from of an Advantest R3767CG vector network analyzer (VNA) in the frequency range of 10 MHz – 8 GHz.
|Publisher||Technology Foundation STW|
|Workshop||10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007|
|Period||29/11/07 → 30/11/07|
- SC-ICF: Integrated Circuit Fabrication