Original language | Undefined |
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Patent number | 09075166.0-1227 |
Priority date | 6/04/09 |
Publication status | In preparation - 6 Apr 2009 |
Keywords
- METIS-258233
S. Unnikrishnan (Inventor), J.K. Chinthaginjala (Inventor), Henricus V. Jansen (Inventor), Michael Curt Elwenspoek (Inventor), Leonardus Lefferts (Inventor)
Research output: Patent
Original language | Undefined |
---|---|
Patent number | 09075166.0-1227 |
Priority date | 6/04/09 |
Publication status | In preparation - 6 Apr 2009 |