Series resistance optimization of high-sensitivity Si-based VUV photodiodes

L. Shi*, L. K. Nanver, A. Šakić, S. Nihtianov, T. Knežević, A. Gottwald, U. Kroth

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

Abstract

Recently, silicon ultrashallow p+n photodiodes, fabricated by a pure boron deposition technology (B-layer diodes), were evaluated for detection in the Vacuum Ultra-Violet (VUV) spectral range from 115 nm to 215 nm wavelengths, where the attenuation length in silicon is only a few nanometers. Superior sensitivity in the order of 0.1 A/W in the whole VUV spectral range was reported [1]. Next to the sensitivity, another important parameter of any photodetector is the response time, which is directly related to its series resistance. In this work a study of the relation between the sensitivity and the series resistance of the B-diodes is presented, supported by simulation results and optical/electrical experimental results. Moreover, practical methods for designing a high sensitivity VUV photodiodes while keeping a relatively low series resistance, are proposed. The experimental results demonstrate that by modifying the diode structure, the series resistance can be effectively reduced. At the same time, the B-layer diodes still maintain a high VUV sensitivity.

Original languageEnglish
Title of host publication2011 IEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Proceedings
Pages818-821
Number of pages4
DOIs
Publication statusPublished - 25 Aug 2011
Externally publishedYes
EventIEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011 - Binjiang, Hangzhou, China
Duration: 10 May 201112 May 2011

Conference

ConferenceIEEE International Instrumentation and Measurement Technology Conference, I2MTC 2011
Abbreviated titleI2MTC 2011
CountryChina
CityBinjiang, Hangzhou
Period10/05/1112/05/11

Keywords

  • photodiode
  • responsivity
  • series resistance
  • time constant
  • ultrashallow junctions
  • Vacuum Ultra-Violet

Fingerprint Dive into the research topics of 'Series resistance optimization of high-sensitivity Si-based VUV photodiodes'. Together they form a unique fingerprint.

Cite this