Shallow junctions formation by spin-on dopants (SOD)

Nhu Toan Nguyen, J. Holleman, N.D. Chien, P.H. Woerlee

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationDish Hotel, Enschede
    Publication statusPublished - 11 Jun 1997

    Keywords

    • METIS-114908

    Cite this