Fingerprint
Dive into the research topics of 'Shrinkage Control of Photoresist for Large-Area Fabrication of Sub-30 nm Periodic Nanocolumns'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Shrinkage Control of Photoresist for Large-Area Fabrication of Sub-30 nm Periodic Nanocolumns
Hai Le The, Johan W. Berenschot, Roald M. Tiggelaar, Niels Roelof Tas, Albert van den Berg, Jan C.T. Eijkel
Research output: Contribution to journal › Article › Academic › peer-review
26
Citations
(Scopus)
223
Downloads
(Pure)