Shuffle motor: a high force, high precision linear electrostatic stepper motor

Niels Roelof Tas, Jeroen Wissink, A.F.M. Sander, Louis Sander, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    6 Citations (Scopus)
    65 Downloads (Pure)

    Abstract

    The shuffle motor is a electrostatic stepper motor that employs a mechanical transformation to obtain high forces and small steps. A model has been made to calculate the driving voltage, step size and maximum load to pull as well as the optimal geometry. Tests results are an effective step size of about 85 nm and a maximum produced force of about 40 μN at 40V clamping voltage and 25 V actuator voltage.
    Original languageUndefined
    Title of host publicationProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages777-780
    Number of pages4
    ISBN (Print)0-7803-3829-4
    DOIs
    Publication statusPublished - 16 Jun 1997
    Event1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997 - Chicago, United States
    Duration: 16 Jun 199719 Jun 1997

    Publication series

    Name
    PublisherIEEE
    Volume2

    Conference

    Conference1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997
    Abbreviated titleTRANSDUCERS 97
    CountryUnited States
    CityChicago
    Period16/06/9719/06/97

    Keywords

    • IR-16000
    • METIS-112882
    • EWI-13505

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