Shuffle motor: a high force, high precision linear electrostatic stepper motor

Niels Roelof Tas; Jeroen Wissink; A.F.M. Sander; Louis Sander; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

doi:10.1109/SENSOR.1997.635215

Shuffle motor: a high force, high precision linear electrostatic stepper motor

Niels Roelof Tas, Jeroen Wissink, A.F.M. Sander, Louis Sander, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

8 Citations (Scopus)

220 Downloads (Pure)

Abstract

The shuffle motor is a electrostatic stepper motor that employs a mechanical transformation to obtain high forces and small steps. A model has been made to calculate the driving voltage, step size and maximum load to pull as well as the optimal geometry. Tests results are an effective step size of about 85 nm and a maximum produced force of about 40 μN at 40V clamping voltage and 25 V actuator voltage.

Original language	Undefined
Title of host publication	Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
Place of Publication	Piscataway
Publisher	IEEE
Pages	777-780
Number of pages	4
ISBN (Print)	0-7803-3829-4
DOIs	https://doi.org/10.1109/SENSOR.1997.635215
Publication status	Published - 16 Jun 1997
Event	1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997 - Chicago, United States Duration: 16 Jun 1997 → 19 Jun 1997

Publication series

Name
Publisher	IEEE
Volume	2

Conference

Conference	1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997
Abbreviated title	TRANSDUCERS 97
Country/Territory	United States
City	Chicago
Period	16/06/97 → 19/06/97

Keywords

IR-16000
METIS-112882
EWI-13505

Access to Document

10.1109/SENSOR.1997.635215

Cite this

@inproceedings{1e580aadfcbe49e4bfe1af896f8273e8,

title = "Shuffle motor: a high force, high precision linear electrostatic stepper motor",

abstract = "The shuffle motor is a electrostatic stepper motor that employs a mechanical transformation to obtain high forces and small steps. A model has been made to calculate the driving voltage, step size and maximum load to pull as well as the optimal geometry. Tests results are an effective step size of about 85 nm and a maximum produced force of about 40 μN at 40V clamping voltage and 25 V actuator voltage.",

keywords = "IR-16000, METIS-112882, EWI-13505",

author = "Tas, {Niels Roelof} and Jeroen Wissink and A.F.M. Sander and Louis Sander and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",

year = "1997",

month = jun,

day = "16",

doi = "10.1109/SENSOR.1997.635215",

language = "Undefined",

isbn = "0-7803-3829-4",

publisher = "IEEE",

pages = "777--780",

booktitle = "Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)",

address = "United States",

note = "1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997 ; Conference date: 16-06-1997 Through 19-06-1997",

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Tas, NR, Wissink, J, Sander, AFM, Sander, L, Lammerink, TSJ & Elwenspoek, MC 1997, Shuffle motor: a high force, high precision linear electrostatic stepper motor. in Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2). IEEE, Piscataway, pp. 777-780, 1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997, Chicago, Illinois, United States, 16/06/97. https://doi.org/10.1109/SENSOR.1997.635215

Shuffle motor: a high force, high precision linear electrostatic stepper motor. / Tas, Niels Roelof; Wissink, Jeroen; Sander, A.F.M. et al.
Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2). Piscataway: IEEE, 1997. p. 777-780.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Shuffle motor: a high force, high precision linear electrostatic stepper motor

AU - Tas, Niels Roelof

AU - Wissink, Jeroen

AU - Sander, A.F.M.

AU - Sander, Louis

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

PY - 1997/6/16

Y1 - 1997/6/16

N2 - The shuffle motor is a electrostatic stepper motor that employs a mechanical transformation to obtain high forces and small steps. A model has been made to calculate the driving voltage, step size and maximum load to pull as well as the optimal geometry. Tests results are an effective step size of about 85 nm and a maximum produced force of about 40 μN at 40V clamping voltage and 25 V actuator voltage.

AB - The shuffle motor is a electrostatic stepper motor that employs a mechanical transformation to obtain high forces and small steps. A model has been made to calculate the driving voltage, step size and maximum load to pull as well as the optimal geometry. Tests results are an effective step size of about 85 nm and a maximum produced force of about 40 μN at 40V clamping voltage and 25 V actuator voltage.

KW - IR-16000

KW - METIS-112882

KW - EWI-13505

U2 - 10.1109/SENSOR.1997.635215

DO - 10.1109/SENSOR.1997.635215

M3 - Conference contribution

SN - 0-7803-3829-4

SP - 777

EP - 780

BT - Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)

PB - IEEE

CY - Piscataway

T2 - 1997 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1997

Y2 - 16 June 1997 through 19 June 1997

ER -