Shuffle motor: a high force, high precision linear electrostatic stepper motor

Niels Roelof Tas, Jeroen Wissink, A.F.M. Sander, Louis Sander, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    8 Citations (Scopus)
    225 Downloads (Pure)

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