Si-epitaxie op het Si(001) oppervlak bestudeerd met ellipsometrie

L.C. Jorritsma, Henricus J.W. Zandvliet, Herbert Wormeester, H.J.M. Oerbekke, Arend van Silfhout

Research output: Contribution to journal › Article › Academic

Keywords

@article{ccd5ea9593484ea7ae5ff3fb73a80fc9,

title = "Si-epitaxie op het Si(001) oppervlak bestudeerd met ellipsometrie",

keywords = "METIS-128876",

author = "L.C. Jorritsma and Zandvliet, {Henricus J.W.} and Herbert Wormeester and H.J.M. Oerbekke and {van Silfhout}, Arend",

year = "1993",

language = "Undefined",

volume = "31",

pages = "65--70",

journal = "NEVAC blad",

issn = "0169-9431",

publisher = "Nederlandse Vacuumvereniging",

number = "3",

}