Side-wall spacers for stiction reduction in surface micromachined mechanisms

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of Micromechanics Europe Workshop 1996
Place of PublicationBarcelona, Spain
Pages92-95
Publication statusPublished - 21 Oct 1996
Event7th MicroMechanics Europe Workshop, MME 1996 - Barcelona, Spain
Duration: 21 Oct 199622 Oct 1996
Conference number: 7

Other

Other7th MicroMechanics Europe Workshop, MME 1996
Abbreviated titleMME
CountrySpain
CityBarcelona
Period21/10/9622/10/96

Keywords

  • METIS-112891
  • IR-16009

Cite this

Tas, N. R., Elwenspoek, M. C., & Legtenberg, R. (1996). Side-wall spacers for stiction reduction in surface micromachined mechanisms. In Proceedings of Micromechanics Europe Workshop 1996 (pp. 92-95). Barcelona, Spain.
Tas, Niels Roelof ; Elwenspoek, Michael Curt ; Legtenberg, R. / Side-wall spacers for stiction reduction in surface micromachined mechanisms. Proceedings of Micromechanics Europe Workshop 1996. Barcelona, Spain, 1996. pp. 92-95
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title = "Side-wall spacers for stiction reduction in surface micromachined mechanisms",
keywords = "METIS-112891, IR-16009",
author = "Tas, {Niels Roelof} and Elwenspoek, {Michael Curt} and R. Legtenberg",
year = "1996",
month = "10",
day = "21",
language = "English",
pages = "92--95",
booktitle = "Proceedings of Micromechanics Europe Workshop 1996",

}

Tas, NR, Elwenspoek, MC & Legtenberg, R 1996, Side-wall spacers for stiction reduction in surface micromachined mechanisms. in Proceedings of Micromechanics Europe Workshop 1996. Barcelona, Spain, pp. 92-95, 7th MicroMechanics Europe Workshop, MME 1996, Barcelona, Spain, 21/10/96.

Side-wall spacers for stiction reduction in surface micromachined mechanisms. / Tas, Niels Roelof; Elwenspoek, Michael Curt; Legtenberg, R.

Proceedings of Micromechanics Europe Workshop 1996. Barcelona, Spain, 1996. p. 92-95.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Side-wall spacers for stiction reduction in surface micromachined mechanisms

AU - Tas, Niels Roelof

AU - Elwenspoek, Michael Curt

AU - Legtenberg, R.

PY - 1996/10/21

Y1 - 1996/10/21

KW - METIS-112891

KW - IR-16009

M3 - Conference contribution

SP - 92

EP - 95

BT - Proceedings of Micromechanics Europe Workshop 1996

CY - Barcelona, Spain

ER -

Tas NR, Elwenspoek MC, Legtenberg R. Side-wall spacers for stiction reduction in surface micromachined mechanisms. In Proceedings of Micromechanics Europe Workshop 1996. Barcelona, Spain. 1996. p. 92-95