Side-wall spacers for stiction reduction in surface micromachined mechanisms

Niels Roelof Tas, Michael Curt Elwenspoek, R. Legtenberg

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationProceedings of Micromechanics Europe Workshop 1996
    Place of PublicationBarcelona, Spain
    Pages92-95
    Publication statusPublished - 21 Oct 1996
    Event7th MicroMechanics Europe Workshop, MME 1996 - Barcelona, Spain
    Duration: 21 Oct 199622 Oct 1996
    Conference number: 7

    Other

    Other7th MicroMechanics Europe Workshop, MME 1996
    Abbreviated titleMME
    CountrySpain
    CityBarcelona
    Period21/10/9622/10/96

    Keywords

    • METIS-112891
    • IR-16009

    Cite this

    Tas, N. R., Elwenspoek, M. C., & Legtenberg, R. (1996). Side-wall spacers for stiction reduction in surface micromachined mechanisms. In Proceedings of Micromechanics Europe Workshop 1996 (pp. 92-95). Barcelona, Spain.