Side-wall spacers for stiction reduction in surface micromachined mechanisms

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of Micromechanics Europe Workshop 1996
Place of Publication	Barcelona, Spain
Pages	92-95
Publication status	Published - 21 Oct 1996
Event	7th MicroMechanics Europe Workshop, MME 1996 - Barcelona, Spain Duration: 21 Oct 1996 → 22 Oct 1996 Conference number: 7

Other	7th MicroMechanics Europe Workshop, MME 1996
Abbreviated title	MME
Country/Territory	Spain
City	Barcelona
Period	21/10/96 → 22/10/96

Keywords

@inproceedings{d20537eebba94af3a09f83351e1783bc,

title = "Side-wall spacers for stiction reduction in surface micromachined mechanisms",

keywords = "METIS-112891, IR-16009",

author = "Tas, \{Niels Roelof\} and Elwenspoek, \{Michael Curt\} and R. Legtenberg",

year = "1996",

month = oct,

day = "21",

language = "English",

pages = "92--95",

booktitle = "Proceedings of Micromechanics Europe Workshop 1996",

note = "7th MicroMechanics Europe Workshop, MME 1996, MME ; Conference date: 21-10-1996 Through 22-10-1996",

}

TY - GEN

T1 - Side-wall spacers for stiction reduction in surface micromachined mechanisms

AU - Tas, Niels Roelof

AU - Elwenspoek, Michael Curt

AU - Legtenberg, R.

N1 - Conference code: 7

PY - 1996/10/21

Y1 - 1996/10/21

KW - METIS-112891

KW - IR-16009

M3 - Conference contribution

SP - 92

EP - 95

BT - Proceedings of Micromechanics Europe Workshop 1996

CY - Barcelona, Spain

T2 - 7th MicroMechanics Europe Workshop, MME 1996

Y2 - 21 October 1996 through 22 October 1996

ER -