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Sidewall patterning - A new wafer-scale method for accurate patterning of vertical silicon structures
P. J. Westerik, W. J.C. Vijselaar, J. W. Berenschot, N. R. Tas (Corresponding Author), J. Huskens, J. G.E. Gardeniers
Research output: Contribution to journal › Article › Academic › peer-review
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