SiGe HBTs implemented with implanted laser-annealed emitters to completely eliminate the transient enhanced diffusion

G. Lorito*, V. Gonda, T. L.M. Scholtes, L. K. Nanver

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

4 Citations (Scopus)

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Engineering & Materials Science