Silicon active microvalves using buckled membranes for actuation

D.O. Popescu, Dan C. Dascula, Michael Curt Elwenspoek, Theodorus S.J. Lammerink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	17th annual semiconductor conference
Place of Publication	Romania
Pages	313-316
Number of pages	4
Publication status	Published - 11 Oct 1994
Event	17th Annual Semiconductor Conference, CAS 1994 - Sinaia, Romania Duration: 11 Oct 1994 → 16 Oct 1994 Conference number: 17

Conference	17th Annual Semiconductor Conference, CAS 1994
Abbreviated title	CAS
Country/Territory	Romania
City	Sinaia
Period	11/10/94 → 16/10/94

Keywords

@inproceedings{5a159f19f8c44dba9819cc9f0d16695a,

title = "Silicon active microvalves using buckled membranes for actuation",

keywords = "METIS-114107, IR-17212",

author = "D.O. Popescu and Dascula, {Dan C.} and Elwenspoek, {Michael Curt} and Lammerink, {Theodorus S.J.}",

year = "1994",

month = oct,

day = "11",

language = "Undefined",

pages = "313--316",

booktitle = "17th annual semiconductor conference",

note = "17th Annual Semiconductor Conference, CAS 1994 ; Conference date: 11-10-1994 Through 16-10-1994",

}

TY - GEN

T1 - Silicon active microvalves using buckled membranes for actuation

AU - Popescu, D.O.

AU - Dascula, Dan C.

AU - Elwenspoek, Michael Curt

AU - Lammerink, Theodorus S.J.

N1 - Conference code: 17

PY - 1994/10/11

Y1 - 1994/10/11

KW - METIS-114107

KW - IR-17212

M3 - Conference contribution

SP - 313

EP - 316

BT - 17th annual semiconductor conference

CY - Romania

T2 - 17th Annual Semiconductor Conference, CAS 1994

Y2 - 11 October 1994 through 16 October 1994

ER -