Silicon active microvalves using buckled membranes for actuation

D.O. Popescu, Dan C. Dascula, Michael Curt Elwenspoek, Theodorus S.J. Lammerink

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publication17th annual semiconductor conference
    Place of PublicationRomania
    Pages313-316
    Number of pages4
    Publication statusPublished - 11 Oct 1994
    Event17th Annual Semiconductor Conference, CAS 1994 - Sinaia, Romania
    Duration: 11 Oct 199416 Oct 1994
    Conference number: 17

    Conference

    Conference17th Annual Semiconductor Conference, CAS 1994
    Abbreviated titleCAS
    CountryRomania
    CitySinaia
    Period11/10/9416/10/94

    Keywords

    • METIS-114107
    • IR-17212

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