Silicon active microvalves using buckled membranes for actuation

D.O. Popescu, D. Dascula, Michael Curt Elwenspoek, Theodorus S.J. Lammerink

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationStockholm
    Publication statusPublished - 25 Jun 1995

    Keywords

    • METIS-114930

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