Silicon active microvalves using buckled membranes for actuation

Dan S. Popescu; Dan C. Dascula; Miko Elwenspoek; Theo S.J. Lammerink

Silicon active microvalves using buckled membranes for actuation

Dan S. Popescu, Dan C. Dascula, Miko Elwenspoek, Theo S.J. Lammerink

Research output: Contribution to conference › Poster › Other research output

Original language	English
Number of pages	1
Publication status	Published - 25 Jun 1995
Event	Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors - Stockholm, Sweden Duration: 25 Jun 1995 → 29 Jun 1995 Conference number: 9

Conference

Conference	Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors
Country/Territory	Sweden
City	Stockholm
Period	25/06/95 → 29/06/95

2 Conference contribution

Silicon active microvalves using buckled membranes for actuation
Popescu, D. S., Dascula, D. C., Elwenspoek, M. & Lammerink, T., 1995, The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. Piscataway, NJ: IEEE, p. 305-308 4 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Open Access
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11 Citations (Scopus)

235 Downloads (Pure)
Silicon active microvalves using buckled membranes for actuation
Popescu, D. S., Dascula, D. C., Elwenspoek, M. & Lammerink, T., 11 Oct 1994, 17th annual semiconductor conference. Romania, p. 313-316 4 p.
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Cite this

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title = "Silicon active microvalves using buckled membranes for actuation",

author = "Popescu, {Dan S.} and Dascula, {Dan C.} and Miko Elwenspoek and Lammerink, {Theo S.J.}",

year = "1995",

month = jun,

day = "25",

language = "English",

note = "Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors ; Conference date: 25-06-1995 Through 29-06-1995",

}

Silicon active microvalves using buckled membranes for actuation. / Popescu, Dan S.; Dascula, Dan C.; Elwenspoek, Miko et al.
1995. Poster session presented at Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors, Stockholm, Sweden.

Research output: Contribution to conference › Poster › Other research output

TY - CONF

T1 - Silicon active microvalves using buckled membranes for actuation

AU - Popescu, Dan S.

AU - Dascula, Dan C.

AU - Elwenspoek, Miko

AU - Lammerink, Theo S.J.

N1 - Conference code: 9

PY - 1995/6/25

Y1 - 1995/6/25

M3 - Poster

T2 - Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors

Y2 - 25 June 1995 through 29 June 1995

ER -