Silicon active microvalves using buckled membranes for actuation

Dan S. Popescu, Dan C. Dascula, Miko Elwenspoek, Theo S.J. Lammerink

    Research output: Contribution to conferencePosterOther research output

    Original languageEnglish
    Number of pages1
    Publication statusPublished - 25 Jun 1995
    EventTransducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors - Stockholm, Sweden
    Duration: 25 Jun 199529 Jun 1995
    Conference number: 9

    Conference

    ConferenceTransducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors
    Country/TerritorySweden
    CityStockholm
    Period25/06/9529/06/95
    • Silicon active microvalves using buckled membranes for actuation

      Popescu, D. S., Dascula, D. C., Elwenspoek, M. & Lammerink, T., 1995, The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. Piscataway, NJ: IEEE, p. 305-308 4 p.

      Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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      11 Citations (Scopus)
      235 Downloads (Pure)
    • Silicon active microvalves using buckled membranes for actuation

      Popescu, D. S., Dascula, D. C., Elwenspoek, M. & Lammerink, T., 11 Oct 1994, 17th annual semiconductor conference. Romania, p. 313-316 4 p.

      Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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