Silicon active microvalves using buckled membranes for actuation

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationStockholm
    Publication statusPublished - 25 Jun 1995

    Keywords

    • METIS-114930

    Cite this

    @misc{a21fa669231c425d90dde54c4a91a650,
    title = "Silicon active microvalves using buckled membranes for actuation",
    keywords = "METIS-114930",
    author = "D.O. Popescu and D. Dascula and Elwenspoek, {Michael Curt} and Lammerink, {Theodorus S.J.}",
    year = "1995",
    month = "6",
    day = "25",
    language = "Undefined",
    type = "Other",

    }

    Silicon active microvalves using buckled membranes for actuation. / Popescu, D.O.; Dascula, D.; Elwenspoek, Michael Curt; Lammerink, Theodorus S.J.

    Stockholm. 1995, .

    Research output: Other contributionOther research output

    TY - GEN

    T1 - Silicon active microvalves using buckled membranes for actuation

    AU - Popescu, D.O.

    AU - Dascula, D.

    AU - Elwenspoek, Michael Curt

    AU - Lammerink, Theodorus S.J.

    PY - 1995/6/25

    Y1 - 1995/6/25

    KW - METIS-114930

    M3 - Other contribution

    CY - Stockholm

    ER -