Silicon active microvalves using buckled membranes for actuation

D.O. Popescu, Dan C. Dascula, Michael Curt Elwenspoek, Theodorus S.J. Lammerink

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    11 Citations (Scopus)
    56 Downloads (Pure)

    Abstract

    Design considerations and experiments have been made for obtaining a new type of active microvalves using silicon buckled membranes. The properties of the buckled membranes permitting to obtain high deflections and to actuate them more convenient are demonstrated. A thermal actuation using an aluminium ring layer heated with a polysilicon resistor is analysed. The polysilicon and the aluminium ring layers have been deposited in the region of the membrane having the minimum internal stress. The fabrication process consist of photolithography, LPCVD depositions, diffusion, AI sputtering. isotropic, anisotropic etching and anodic bonding. The design and experiments show a convenient low temperature range necessary to actuate the microvalve
    Original languageUndefined
    Title of host publicationThe 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95.
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages305-308
    Number of pages4
    ISBN (Print)91-630-3473-5
    DOIs
    Publication statusPublished - 1995
    EventTransducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors - Stockholm, Sweden
    Duration: 25 Jun 199529 Jun 1995
    Conference number: 9

    Publication series

    Name
    PublisherIEEE

    Conference

    ConferenceTransducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors
    CountrySweden
    CityStockholm
    Period25/06/9529/06/95

    Keywords

    • EWI-13854
    • METIS-114110
    • IR-17215

    Cite this

    Popescu, D. O., Dascula, D. C., Elwenspoek, M. C., & Lammerink, T. S. J. (1995). Silicon active microvalves using buckled membranes for actuation. In The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. (pp. 305-308). Piscataway: IEEE Computer Society. https://doi.org/10.1109/SENSOR.1995.717179
    Popescu, D.O. ; Dascula, Dan C. ; Elwenspoek, Michael Curt ; Lammerink, Theodorus S.J. / Silicon active microvalves using buckled membranes for actuation. The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95.. Piscataway : IEEE Computer Society, 1995. pp. 305-308
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    title = "Silicon active microvalves using buckled membranes for actuation",
    abstract = "Design considerations and experiments have been made for obtaining a new type of active microvalves using silicon buckled membranes. The properties of the buckled membranes permitting to obtain high deflections and to actuate them more convenient are demonstrated. A thermal actuation using an aluminium ring layer heated with a polysilicon resistor is analysed. The polysilicon and the aluminium ring layers have been deposited in the region of the membrane having the minimum internal stress. The fabrication process consist of photolithography, LPCVD depositions, diffusion, AI sputtering. isotropic, anisotropic etching and anodic bonding. The design and experiments show a convenient low temperature range necessary to actuate the microvalve",
    keywords = "EWI-13854, METIS-114110, IR-17215",
    author = "D.O. Popescu and Dascula, {Dan C.} and Elwenspoek, {Michael Curt} and Lammerink, {Theodorus S.J.}",
    year = "1995",
    doi = "10.1109/SENSOR.1995.717179",
    language = "Undefined",
    isbn = "91-630-3473-5",
    publisher = "IEEE Computer Society",
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    booktitle = "The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95.",
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    Popescu, DO, Dascula, DC, Elwenspoek, MC & Lammerink, TSJ 1995, Silicon active microvalves using buckled membranes for actuation. in The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95.. IEEE Computer Society, Piscataway, pp. 305-308, Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors, Stockholm, Sweden, 25/06/95. https://doi.org/10.1109/SENSOR.1995.717179

    Silicon active microvalves using buckled membranes for actuation. / Popescu, D.O.; Dascula, Dan C.; Elwenspoek, Michael Curt; Lammerink, Theodorus S.J.

    The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95.. Piscataway : IEEE Computer Society, 1995. p. 305-308.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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    T1 - Silicon active microvalves using buckled membranes for actuation

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    AU - Elwenspoek, Michael Curt

    AU - Lammerink, Theodorus S.J.

    PY - 1995

    Y1 - 1995

    N2 - Design considerations and experiments have been made for obtaining a new type of active microvalves using silicon buckled membranes. The properties of the buckled membranes permitting to obtain high deflections and to actuate them more convenient are demonstrated. A thermal actuation using an aluminium ring layer heated with a polysilicon resistor is analysed. The polysilicon and the aluminium ring layers have been deposited in the region of the membrane having the minimum internal stress. The fabrication process consist of photolithography, LPCVD depositions, diffusion, AI sputtering. isotropic, anisotropic etching and anodic bonding. The design and experiments show a convenient low temperature range necessary to actuate the microvalve

    AB - Design considerations and experiments have been made for obtaining a new type of active microvalves using silicon buckled membranes. The properties of the buckled membranes permitting to obtain high deflections and to actuate them more convenient are demonstrated. A thermal actuation using an aluminium ring layer heated with a polysilicon resistor is analysed. The polysilicon and the aluminium ring layers have been deposited in the region of the membrane having the minimum internal stress. The fabrication process consist of photolithography, LPCVD depositions, diffusion, AI sputtering. isotropic, anisotropic etching and anodic bonding. The design and experiments show a convenient low temperature range necessary to actuate the microvalve

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    KW - IR-17215

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    M3 - Conference contribution

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    PB - IEEE Computer Society

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    Popescu DO, Dascula DC, Elwenspoek MC, Lammerink TSJ. Silicon active microvalves using buckled membranes for actuation. In The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95.. Piscataway: IEEE Computer Society. 1995. p. 305-308 https://doi.org/10.1109/SENSOR.1995.717179