Silicon active microvalves using buckled membranes for actuation

D.O. Popescu; Dan C. Dascula; Michael Curt Elwenspoek; Theodorus S.J. Lammerink

doi:10.1109/SENSOR.1995.717179

Silicon active microvalves using buckled membranes for actuation

D.O. Popescu, Dan C. Dascula, Michael Curt Elwenspoek, Theodorus S.J. Lammerink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

11 Citations (Scopus)

234 Downloads (Pure)

Abstract

Design considerations and experiments have been made for obtaining a new type of active microvalves using silicon buckled membranes. The properties of the buckled membranes permitting to obtain high deflections and to actuate them more convenient are demonstrated. A thermal actuation using an aluminium ring layer heated with a polysilicon resistor is analysed. The polysilicon and the aluminium ring layers have been deposited in the region of the membrane having the minimum internal stress. The fabrication process consist of photolithography, LPCVD depositions, diffusion, AI sputtering. isotropic, anisotropic etching and anodic bonding. The design and experiments show a convenient low temperature range necessary to actuate the microvalve

Original language	Undefined
Title of host publication	The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95.
Place of Publication	Piscataway
Publisher	IEEE
Pages	305-308
Number of pages	4
ISBN (Print)	91-630-3473-5
DOIs	https://doi.org/10.1109/SENSOR.1995.717179
Publication status	Published - 1995
Event	Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors - Stockholm, Sweden Duration: 25 Jun 1995 → 29 Jun 1995 Conference number: 9

Publication series

Name
Publisher	IEEE

Conference

Conference	Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors
Country/Territory	Sweden
City	Stockholm
Period	25/06/95 → 29/06/95

Keywords

EWI-13854
METIS-114110
IR-17215

Access to Document

10.1109/SENSOR.1995.717179

http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=721807

Cite this

@inproceedings{ebfddec4bf50480294c743602328459d,

title = "Silicon active microvalves using buckled membranes for actuation",

abstract = "Design considerations and experiments have been made for obtaining a new type of active microvalves using silicon buckled membranes. The properties of the buckled membranes permitting to obtain high deflections and to actuate them more convenient are demonstrated. A thermal actuation using an aluminium ring layer heated with a polysilicon resistor is analysed. The polysilicon and the aluminium ring layers have been deposited in the region of the membrane having the minimum internal stress. The fabrication process consist of photolithography, LPCVD depositions, diffusion, AI sputtering. isotropic, anisotropic etching and anodic bonding. The design and experiments show a convenient low temperature range necessary to actuate the microvalve",

keywords = "EWI-13854, METIS-114110, IR-17215",

author = "D.O. Popescu and Dascula, {Dan C.} and Elwenspoek, {Michael Curt} and Lammerink, {Theodorus S.J.}",

year = "1995",

doi = "10.1109/SENSOR.1995.717179",

language = "Undefined",

isbn = "91-630-3473-5",

publisher = "IEEE",

pages = "305--308",

booktitle = "The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95.",

address = "United States",

note = "Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors ; Conference date: 25-06-1995 Through 29-06-1995",

}

Popescu, DO, Dascula, DC, Elwenspoek, MC & Lammerink, TSJ 1995, Silicon active microvalves using buckled membranes for actuation. in The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95.. IEEE, Piscataway, pp. 305-308, Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors, Stockholm, Sweden, 25/06/95. https://doi.org/10.1109/SENSOR.1995.717179

Silicon active microvalves using buckled membranes for actuation. / Popescu, D.O.; Dascula, Dan C.; Elwenspoek, Michael Curt et al.
The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95.. Piscataway: IEEE, 1995. p. 305-308.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Silicon active microvalves using buckled membranes for actuation

AU - Popescu, D.O.

AU - Dascula, Dan C.

AU - Elwenspoek, Michael Curt

AU - Lammerink, Theodorus S.J.

N1 - Conference code: 9

PY - 1995

Y1 - 1995

N2 - Design considerations and experiments have been made for obtaining a new type of active microvalves using silicon buckled membranes. The properties of the buckled membranes permitting to obtain high deflections and to actuate them more convenient are demonstrated. A thermal actuation using an aluminium ring layer heated with a polysilicon resistor is analysed. The polysilicon and the aluminium ring layers have been deposited in the region of the membrane having the minimum internal stress. The fabrication process consist of photolithography, LPCVD depositions, diffusion, AI sputtering. isotropic, anisotropic etching and anodic bonding. The design and experiments show a convenient low temperature range necessary to actuate the microvalve

AB - Design considerations and experiments have been made for obtaining a new type of active microvalves using silicon buckled membranes. The properties of the buckled membranes permitting to obtain high deflections and to actuate them more convenient are demonstrated. A thermal actuation using an aluminium ring layer heated with a polysilicon resistor is analysed. The polysilicon and the aluminium ring layers have been deposited in the region of the membrane having the minimum internal stress. The fabrication process consist of photolithography, LPCVD depositions, diffusion, AI sputtering. isotropic, anisotropic etching and anodic bonding. The design and experiments show a convenient low temperature range necessary to actuate the microvalve

KW - EWI-13854

KW - METIS-114110

KW - IR-17215

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DO - 10.1109/SENSOR.1995.717179

M3 - Conference contribution

SN - 91-630-3473-5

SP - 305

EP - 308

BT - The 8th International Conference on Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95.

PB - IEEE

CY - Piscataway

T2 - Transducers '95 - Eurosensors IX: 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors

Y2 - 25 June 1995 through 29 June 1995

ER -