Abstract
The past two decades have seen rapid advancement of Lab on a Chip (LOC) systems with applications
ranging from gas chromatography to capillary electrophoresis, and more recently to high-pressure
chemistry and single cell analysis. For many applications in clinical medicine, biology and chemistry,
silicon and glass may still be the preferred materials. The mechanical rigidity, chemical resistance, and
low permeability properties of silicon and glass, combined with the optical transparency of glass, make
them a good choice for many demanding LOC applications. The large and well developed silicon and
glass micromachining toolbox provide the capability to obtain microstructures with high precision and
repeatability. In addition, scaling device dimensions down to the nanometer scale is relatively straight
forward using silicon and glass micromachining, which is important for emerging fields, such
nanofluidics and nanosensing.
| Original language | Undefined |
|---|---|
| Title of host publication | Fabrication and Microfluidics |
| Editors | K.E. Herold, A. Rasooly |
| Place of Publication | Norfolk, UK |
| Publisher | Caister Academic Press |
| Pages | xiv + 410 |
| Number of pages | 37 |
| ISBN (Print) | 978-1-904455-46-2 |
| Publication status | Published - Aug 2009 |
Publication series
| Name | Lab-on-a-Chip Technology for biomedical and biological applications |
|---|---|
| Publisher | Caister Academic Press |
| Number | 1 |
| Volume | 1 |
Keywords
- METIS-265272
- EWI-17378
- IR-69840
Cite this
Carlen, E., Bomer, J. G., van Nieuwkasteele, J. W., & van den Berg, A. (2009). Silicon and Glass Micromachining. In K. E. Herold, & A. Rasooly (Eds.), Fabrication and Microfluidics (pp. xiv + 410). (Lab-on-a-Chip Technology for biomedical and biological applications; Vol. 1, No. 1). Norfolk, UK: Caister Academic Press.