Silicon and Glass Micromachining

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    Abstract

    The past two decades have seen rapid advancement of Lab on a Chip (LOC) systems with applications ranging from gas chromatography to capillary electrophoresis, and more recently to high-pressure chemistry and single cell analysis. For many applications in clinical medicine, biology and chemistry, silicon and glass may still be the preferred materials. The mechanical rigidity, chemical resistance, and low permeability properties of silicon and glass, combined with the optical transparency of glass, make them a good choice for many demanding LOC applications. The large and well developed silicon and glass micromachining toolbox provide the capability to obtain microstructures with high precision and repeatability. In addition, scaling device dimensions down to the nanometer scale is relatively straight forward using silicon and glass micromachining, which is important for emerging fields, such nanofluidics and nanosensing.
    Original languageUndefined
    Title of host publicationFabrication and Microfluidics
    EditorsK.E. Herold, A. Rasooly
    Place of PublicationNorfolk, UK
    PublisherCaister Academic Press
    Pagesxiv + 410
    Number of pages37
    ISBN (Print)978-1-904455-46-2
    Publication statusPublished - Aug 2009

    Publication series

    NameLab-on-a-Chip Technology for biomedical and biological applications
    PublisherCaister Academic Press
    Number1
    Volume1

    Keywords

    • METIS-265272
    • EWI-17378
    • IR-69840

    Cite this

    Carlen, E., Bomer, J. G., van Nieuwkasteele, J. W., & van den Berg, A. (2009). Silicon and Glass Micromachining. In K. E. Herold, & A. Rasooly (Eds.), Fabrication and Microfluidics (pp. xiv + 410). (Lab-on-a-Chip Technology for biomedical and biological applications; Vol. 1, No. 1). Norfolk, UK: Caister Academic Press.
    Carlen, Edwin ; Bomer, Johan G. ; van Nieuwkasteele, Jan William ; van den Berg, Albert. / Silicon and Glass Micromachining. Fabrication and Microfluidics. editor / K.E. Herold ; A. Rasooly. Norfolk, UK : Caister Academic Press, 2009. pp. xiv + 410 (Lab-on-a-Chip Technology for biomedical and biological applications; 1).
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    abstract = "The past two decades have seen rapid advancement of Lab on a Chip (LOC) systems with applications ranging from gas chromatography to capillary electrophoresis, and more recently to high-pressure chemistry and single cell analysis. For many applications in clinical medicine, biology and chemistry, silicon and glass may still be the preferred materials. The mechanical rigidity, chemical resistance, and low permeability properties of silicon and glass, combined with the optical transparency of glass, make them a good choice for many demanding LOC applications. The large and well developed silicon and glass micromachining toolbox provide the capability to obtain microstructures with high precision and repeatability. In addition, scaling device dimensions down to the nanometer scale is relatively straight forward using silicon and glass micromachining, which is important for emerging fields, such nanofluidics and nanosensing.",
    keywords = "METIS-265272, EWI-17378, IR-69840",
    author = "Edwin Carlen and Bomer, {Johan G.} and {van Nieuwkasteele}, {Jan William} and {van den Berg}, Albert",
    note = "http://www.horizonpress.com/loc1",
    year = "2009",
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    series = "Lab-on-a-Chip Technology for biomedical and biological applications",
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    Carlen, E, Bomer, JG, van Nieuwkasteele, JW & van den Berg, A 2009, Silicon and Glass Micromachining. in KE Herold & A Rasooly (eds), Fabrication and Microfluidics. Lab-on-a-Chip Technology for biomedical and biological applications, no. 1, vol. 1, Caister Academic Press, Norfolk, UK, pp. xiv + 410.

    Silicon and Glass Micromachining. / Carlen, Edwin; Bomer, Johan G.; van Nieuwkasteele, Jan William; van den Berg, Albert.

    Fabrication and Microfluidics. ed. / K.E. Herold; A. Rasooly. Norfolk, UK : Caister Academic Press, 2009. p. xiv + 410 (Lab-on-a-Chip Technology for biomedical and biological applications; Vol. 1, No. 1).

    Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

    TY - CHAP

    T1 - Silicon and Glass Micromachining

    AU - Carlen, Edwin

    AU - Bomer, Johan G.

    AU - van Nieuwkasteele, Jan William

    AU - van den Berg, Albert

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    PY - 2009/8

    Y1 - 2009/8

    N2 - The past two decades have seen rapid advancement of Lab on a Chip (LOC) systems with applications ranging from gas chromatography to capillary electrophoresis, and more recently to high-pressure chemistry and single cell analysis. For many applications in clinical medicine, biology and chemistry, silicon and glass may still be the preferred materials. The mechanical rigidity, chemical resistance, and low permeability properties of silicon and glass, combined with the optical transparency of glass, make them a good choice for many demanding LOC applications. The large and well developed silicon and glass micromachining toolbox provide the capability to obtain microstructures with high precision and repeatability. In addition, scaling device dimensions down to the nanometer scale is relatively straight forward using silicon and glass micromachining, which is important for emerging fields, such nanofluidics and nanosensing.

    AB - The past two decades have seen rapid advancement of Lab on a Chip (LOC) systems with applications ranging from gas chromatography to capillary electrophoresis, and more recently to high-pressure chemistry and single cell analysis. For many applications in clinical medicine, biology and chemistry, silicon and glass may still be the preferred materials. The mechanical rigidity, chemical resistance, and low permeability properties of silicon and glass, combined with the optical transparency of glass, make them a good choice for many demanding LOC applications. The large and well developed silicon and glass micromachining toolbox provide the capability to obtain microstructures with high precision and repeatability. In addition, scaling device dimensions down to the nanometer scale is relatively straight forward using silicon and glass micromachining, which is important for emerging fields, such nanofluidics and nanosensing.

    KW - METIS-265272

    KW - EWI-17378

    KW - IR-69840

    M3 - Chapter

    SN - 978-1-904455-46-2

    T3 - Lab-on-a-Chip Technology for biomedical and biological applications

    SP - xiv + 410

    BT - Fabrication and Microfluidics

    A2 - Herold, K.E.

    A2 - Rasooly, A.

    PB - Caister Academic Press

    CY - Norfolk, UK

    ER -

    Carlen E, Bomer JG, van Nieuwkasteele JW, van den Berg A. Silicon and Glass Micromachining. In Herold KE, Rasooly A, editors, Fabrication and Microfluidics. Norfolk, UK: Caister Academic Press. 2009. p. xiv + 410. (Lab-on-a-Chip Technology for biomedical and biological applications; 1).