Abstract
| Original language | Undefined |
|---|---|
| Title of host publication | Fabrication and Microfluidics |
| Editors | K.E. Herold, A. Rasooly |
| Place of Publication | Norfolk, UK |
| Publisher | Caister Academic Press |
| Pages | xiv + 410 |
| Number of pages | 37 |
| ISBN (Print) | 978-1-904455-46-2 |
| Publication status | Published - Aug 2009 |
Publication series
| Name | Lab-on-a-Chip Technology for biomedical and biological applications |
|---|---|
| Publisher | Caister Academic Press |
| Number | 1 |
| Volume | 1 |
Keywords
- METIS-265272
- EWI-17378
- IR-69840
Cite this
}
Silicon and Glass Micromachining. / Carlen, Edwin; Bomer, Johan G.; van Nieuwkasteele, Jan William; van den Berg, Albert.
Fabrication and Microfluidics. ed. / K.E. Herold; A. Rasooly. Norfolk, UK : Caister Academic Press, 2009. p. xiv + 410 (Lab-on-a-Chip Technology for biomedical and biological applications; Vol. 1, No. 1).Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic › peer-review
TY - CHAP
T1 - Silicon and Glass Micromachining
AU - Carlen, Edwin
AU - Bomer, Johan G.
AU - van Nieuwkasteele, Jan William
AU - van den Berg, Albert
N1 - http://www.horizonpress.com/loc1
PY - 2009/8
Y1 - 2009/8
N2 - The past two decades have seen rapid advancement of Lab on a Chip (LOC) systems with applications ranging from gas chromatography to capillary electrophoresis, and more recently to high-pressure chemistry and single cell analysis. For many applications in clinical medicine, biology and chemistry, silicon and glass may still be the preferred materials. The mechanical rigidity, chemical resistance, and low permeability properties of silicon and glass, combined with the optical transparency of glass, make them a good choice for many demanding LOC applications. The large and well developed silicon and glass micromachining toolbox provide the capability to obtain microstructures with high precision and repeatability. In addition, scaling device dimensions down to the nanometer scale is relatively straight forward using silicon and glass micromachining, which is important for emerging fields, such nanofluidics and nanosensing.
AB - The past two decades have seen rapid advancement of Lab on a Chip (LOC) systems with applications ranging from gas chromatography to capillary electrophoresis, and more recently to high-pressure chemistry and single cell analysis. For many applications in clinical medicine, biology and chemistry, silicon and glass may still be the preferred materials. The mechanical rigidity, chemical resistance, and low permeability properties of silicon and glass, combined with the optical transparency of glass, make them a good choice for many demanding LOC applications. The large and well developed silicon and glass micromachining toolbox provide the capability to obtain microstructures with high precision and repeatability. In addition, scaling device dimensions down to the nanometer scale is relatively straight forward using silicon and glass micromachining, which is important for emerging fields, such nanofluidics and nanosensing.
KW - METIS-265272
KW - EWI-17378
KW - IR-69840
M3 - Chapter
SN - 978-1-904455-46-2
T3 - Lab-on-a-Chip Technology for biomedical and biological applications
SP - xiv + 410
BT - Fabrication and Microfluidics
A2 - Herold, K.E.
A2 - Rasooly, A.
PB - Caister Academic Press
CY - Norfolk, UK
ER -