Silicon and Glass Micromachining

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Abstract

The past two decades have seen rapid advancement of Lab on a Chip (LOC) systems with applications ranging from gas chromatography to capillary electrophoresis, and more recently to high-pressure chemistry and single cell analysis. For many applications in clinical medicine, biology and chemistry, silicon and glass may still be the preferred materials. The mechanical rigidity, chemical resistance, and low permeability properties of silicon and glass, combined with the optical transparency of glass, make them a good choice for many demanding LOC applications. The large and well developed silicon and glass micromachining toolbox provide the capability to obtain microstructures with high precision and repeatability. In addition, scaling device dimensions down to the nanometer scale is relatively straight forward using silicon and glass micromachining, which is important for emerging fields, such nanofluidics and nanosensing.
Original languageUndefined
Title of host publicationFabrication and Microfluidics
EditorsK.E. Herold, A. Rasooly
Place of PublicationNorfolk, UK
PublisherCaister Academic Press
Pagesxiv + 410
Number of pages37
ISBN (Print)978-1-904455-46-2
Publication statusPublished - Aug 2009

Publication series

NameLab-on-a-Chip Technology for biomedical and biological applications
PublisherCaister Academic Press
Number1
Volume1

Keywords

  • METIS-265272
  • EWI-17378
  • IR-69840

Cite this

Carlen, E., Bomer, J. G., van Nieuwkasteele, J. W., & van den Berg, A. (2009). Silicon and Glass Micromachining. In K. E. Herold, & A. Rasooly (Eds.), Fabrication and Microfluidics (pp. xiv + 410). (Lab-on-a-Chip Technology for biomedical and biological applications; Vol. 1, No. 1). Norfolk, UK: Caister Academic Press.
Carlen, Edwin ; Bomer, Johan G. ; van Nieuwkasteele, Jan William ; van den Berg, Albert. / Silicon and Glass Micromachining. Fabrication and Microfluidics. editor / K.E. Herold ; A. Rasooly. Norfolk, UK : Caister Academic Press, 2009. pp. xiv + 410 (Lab-on-a-Chip Technology for biomedical and biological applications; 1).
@inbook{c5d78eee474c48d3b7467839536d2598,
title = "Silicon and Glass Micromachining",
abstract = "The past two decades have seen rapid advancement of Lab on a Chip (LOC) systems with applications ranging from gas chromatography to capillary electrophoresis, and more recently to high-pressure chemistry and single cell analysis. For many applications in clinical medicine, biology and chemistry, silicon and glass may still be the preferred materials. The mechanical rigidity, chemical resistance, and low permeability properties of silicon and glass, combined with the optical transparency of glass, make them a good choice for many demanding LOC applications. The large and well developed silicon and glass micromachining toolbox provide the capability to obtain microstructures with high precision and repeatability. In addition, scaling device dimensions down to the nanometer scale is relatively straight forward using silicon and glass micromachining, which is important for emerging fields, such nanofluidics and nanosensing.",
keywords = "METIS-265272, EWI-17378, IR-69840",
author = "Edwin Carlen and Bomer, {Johan G.} and {van Nieuwkasteele}, {Jan William} and {van den Berg}, Albert",
note = "http://www.horizonpress.com/loc1",
year = "2009",
month = "8",
language = "Undefined",
isbn = "978-1-904455-46-2",
series = "Lab-on-a-Chip Technology for biomedical and biological applications",
publisher = "Caister Academic Press",
number = "1",
pages = "xiv + 410",
editor = "K.E. Herold and A. Rasooly",
booktitle = "Fabrication and Microfluidics",
address = "United Kingdom",

}

Carlen, E, Bomer, JG, van Nieuwkasteele, JW & van den Berg, A 2009, Silicon and Glass Micromachining. in KE Herold & A Rasooly (eds), Fabrication and Microfluidics. Lab-on-a-Chip Technology for biomedical and biological applications, no. 1, vol. 1, Caister Academic Press, Norfolk, UK, pp. xiv + 410.

Silicon and Glass Micromachining. / Carlen, Edwin; Bomer, Johan G.; van Nieuwkasteele, Jan William; van den Berg, Albert.

Fabrication and Microfluidics. ed. / K.E. Herold; A. Rasooly. Norfolk, UK : Caister Academic Press, 2009. p. xiv + 410 (Lab-on-a-Chip Technology for biomedical and biological applications; Vol. 1, No. 1).

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

TY - CHAP

T1 - Silicon and Glass Micromachining

AU - Carlen, Edwin

AU - Bomer, Johan G.

AU - van Nieuwkasteele, Jan William

AU - van den Berg, Albert

N1 - http://www.horizonpress.com/loc1

PY - 2009/8

Y1 - 2009/8

N2 - The past two decades have seen rapid advancement of Lab on a Chip (LOC) systems with applications ranging from gas chromatography to capillary electrophoresis, and more recently to high-pressure chemistry and single cell analysis. For many applications in clinical medicine, biology and chemistry, silicon and glass may still be the preferred materials. The mechanical rigidity, chemical resistance, and low permeability properties of silicon and glass, combined with the optical transparency of glass, make them a good choice for many demanding LOC applications. The large and well developed silicon and glass micromachining toolbox provide the capability to obtain microstructures with high precision and repeatability. In addition, scaling device dimensions down to the nanometer scale is relatively straight forward using silicon and glass micromachining, which is important for emerging fields, such nanofluidics and nanosensing.

AB - The past two decades have seen rapid advancement of Lab on a Chip (LOC) systems with applications ranging from gas chromatography to capillary electrophoresis, and more recently to high-pressure chemistry and single cell analysis. For many applications in clinical medicine, biology and chemistry, silicon and glass may still be the preferred materials. The mechanical rigidity, chemical resistance, and low permeability properties of silicon and glass, combined with the optical transparency of glass, make them a good choice for many demanding LOC applications. The large and well developed silicon and glass micromachining toolbox provide the capability to obtain microstructures with high precision and repeatability. In addition, scaling device dimensions down to the nanometer scale is relatively straight forward using silicon and glass micromachining, which is important for emerging fields, such nanofluidics and nanosensing.

KW - METIS-265272

KW - EWI-17378

KW - IR-69840

M3 - Chapter

SN - 978-1-904455-46-2

T3 - Lab-on-a-Chip Technology for biomedical and biological applications

SP - xiv + 410

BT - Fabrication and Microfluidics

A2 - Herold, K.E.

A2 - Rasooly, A.

PB - Caister Academic Press

CY - Norfolk, UK

ER -

Carlen E, Bomer JG, van Nieuwkasteele JW, van den Berg A. Silicon and Glass Micromachining. In Herold KE, Rasooly A, editors, Fabrication and Microfluidics. Norfolk, UK: Caister Academic Press. 2009. p. xiv + 410. (Lab-on-a-Chip Technology for biomedical and biological applications; 1).