Silicon fusion bonding of rough surface with polishing technique

C. Gui; H. Albers; Johannes G.E. Gardeniers; Michael Curt Elwenspoek; Paul Lambeck

Silicon fusion bonding of rough surface with polishing technique

C. Gui, H. Albers, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, Paul Lambeck

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of micro system technologies '96
Editors	Herbert Reichl, Anton Heuberger
Place of Publication	Potsdam
Publisher	VDE Verlag
Pages	205-210
Publication status	Published - 17 Sept 1996
Event	9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996 - San Diego, United States Duration: 11 Feb 1996 → 15 Feb 1996 Conference number: 9

Publication series

Name
Publisher	VDE-Verlag

Workshop

Workshop	9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996
Abbreviated title	MEMS
Country/Territory	United States
City	San Diego
Period	11/02/96 → 15/02/96

Keywords

METIS-112895
IR-16013

Cite this

@inproceedings{1aa069596c704706bad8c3b63c1bde8a,

title = "Silicon fusion bonding of rough surface with polishing technique",

keywords = "METIS-112895, IR-16013",

author = "C. Gui and H. Albers and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt} and Paul Lambeck",

year = "1996",

month = sep,

day = "17",

language = "Undefined",

publisher = "VDE Verlag",

pages = "205--210",

editor = "Herbert Reichl and Anton Heuberger",

booktitle = "Proceedings of micro system technologies '96",

note = "9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996 ; Conference date: 11-02-1996 Through 15-02-1996",

}

Gui, C, Albers, H, Gardeniers, JGE, Elwenspoek, MC & Lambeck, P 1996, Silicon fusion bonding of rough surface with polishing technique. in H Reichl & A Heuberger (eds), Proceedings of micro system technologies '96. VDE Verlag, Potsdam, pp. 205-210, 9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996, San Diego, California, United States, 11/02/96.

TY - GEN

T1 - Silicon fusion bonding of rough surface with polishing technique

AU - Gui, C.

AU - Albers, H.

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

AU - Lambeck, Paul

N1 - Conference code: 9

PY - 1996/9/17

Y1 - 1996/9/17

KW - METIS-112895

KW - IR-16013

M3 - Conference contribution

SP - 205

EP - 210

BT - Proceedings of micro system technologies '96

A2 - Reichl, Herbert

A2 - Heuberger, Anton

PB - VDE Verlag

CY - Potsdam

T2 - 9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996

Y2 - 11 February 1996 through 15 February 1996

ER -