Silicon fusion bonding of rough surface with polishing technique

C. Gui, H. Albers, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, Paul Lambeck

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of micro system technologies '96
EditorsHerbert Reichl, Anton Heuberger
Place of PublicationPotsdam
PublisherVDE Verlag
Pages205-210
Publication statusPublished - 17 Sep 1996
Event9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996 - San Diego, United States
Duration: 11 Feb 199615 Feb 1996
Conference number: 9

Publication series

Name
PublisherVDE-Verlag

Workshop

Workshop9th Annual International Workshop on Micro Electro Mechanical Systems, MEMS 1996
Abbreviated titleMEMS
CountryUnited States
CitySan Diego
Period11/02/9615/02/96

Keywords

  • METIS-112895
  • IR-16013

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