Silicon fusion bonding with chemical mechanical polishing

C. Gui, H. Albers, Johannes G.E. Gardeniers, Michael Curt Elwenspoek, Paul Lambeck

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings 1996 National Sensor Conference
Editors	M.R. Wolffenbuttel
Place of Publication	Delft
Pages	93-97
Publication status	Published - 20 Mar 1996
Event	1996 National Sensor Conference - Delft, The Netherlands, Delft, Netherlands Duration: 20 Mar 1996 → 21 Mar 1996

Keywords

@inproceedings{963a06fd5c3b4d919ac6f2ffc94b5aa6,

title = "Silicon fusion bonding with chemical mechanical polishing",

keywords = "METIS-114100, IR-17205",

author = "C. Gui and H. Albers and Gardeniers, {Johannes G.E.} and Elwenspoek, {Michael Curt} and Paul Lambeck",

year = "1996",

month = mar,

day = "20",

language = "Undefined",

isbn = "9789040713217",

pages = "93--97",

editor = "M.R. Wolffenbuttel",

booktitle = "Proceedings 1996 National Sensor Conference",

note = "1996 National Sensor Conference ; Conference date: 20-03-1996 Through 21-03-1996",

}

TY - GEN

T1 - Silicon fusion bonding with chemical mechanical polishing

AU - Gui, C.

AU - Albers, H.

AU - Gardeniers, Johannes G.E.

AU - Elwenspoek, Michael Curt

AU - Lambeck, Paul

PY - 1996/3/20

Y1 - 1996/3/20

KW - METIS-114100

KW - IR-17205

M3 - Conference contribution

SN - 9789040713217

SP - 93

EP - 97

BT - Proceedings 1996 National Sensor Conference

A2 - Wolffenbuttel, M.R.

CY - Delft

T2 - 1996 National Sensor Conference

Y2 - 20 March 1996 through 21 March 1996

ER -